Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices

Mian Yao; Jushuai Wu; Aping Zhang; Hwa Yaw Tam; Ping Kong Alexander Wai

doi:10.1109/JSEN.2017.2737551

Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices

Mian Yao, Jushuai Wu, Aping Zhang, Hwa Yaw Tam, Ping Kong Alexander Wai

The Hong Kong Polytechnic University

Research output: Journal article publication › Journal article › Academic research › peer-review

9 Citations (Scopus)

Abstract

We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.

Original language	English
Article number	8004427
Pages (from-to)	7257-7261
Number of pages	5
Journal	IEEE Sensors Journal
Volume	17
Issue number	22
DOIs	https://doi.org/10.1109/JSEN.2017.2737551
Publication status	Published - 15 Nov 2017

Keywords

3D printed sensor
Optical microfabrication
suspended-mirror device

ASJC Scopus subject areas

Instrumentation
Electrical and Electronic Engineering

More information

10.1109/JSEN.2017.2737551

http://hdl.handle.net/10397/100588

Cite this

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title = "Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices",

abstract = "We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.",

keywords = "3D printed sensor, Optical microfabrication, suspended-mirror device",

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AU - Zhang, Aping

AU - Tam, Hwa Yaw

AU - Wai, Ping Kong Alexander

PY - 2017/11/15

Y1 - 2017/11/15

N2 - We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.

AB - We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.

KW - 3D printed sensor

KW - Optical microfabrication

KW - suspended-mirror device

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DO - 10.1109/JSEN.2017.2737551

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JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

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M1 - 8004427

ER -

Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices

Abstract

Keywords

ASJC Scopus subject areas

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