Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices

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6 Citations (Scopus)

Abstract

We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.
Original languageEnglish
Article number8004427
Pages (from-to)7257-7261
Number of pages5
JournalIEEE Sensors Journal
Volume17
Issue number22
DOIs
Publication statusPublished - 15 Nov 2017

Keywords

  • 3D printed sensor
  • Optical microfabrication
  • suspended-mirror device

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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