Optical surface generation in ultra-precision polishing of freeform

超精密抛光是一种新兴的用于制造高精度、高品质的自由曲面光学加工技术。该技术可突破其他自由曲面加工技术的限制,如飞刀铣削和快刀伺服加工的低效、非铁材料的局限等。然而,对超精密抛光中表面生成机理的理解,目前还不完善。探讨了超精密抛光过程中加工策略对表面生成的影响,进行了一系列抛光实验。研究结果表明:抛光表面的质量很大程度上依赖于加工过程条件及抛光策略的适当选择。抛光加工不仅可用于去除其他加工方式所产生的不利性刀纹,还可以产生功能性应用的结构性表面。该研究结果为深入理解超精密抛光自由曲面光学的表面生成机理,以及优化超精密抛光的表面质量,提供了重要依据和方法。 更多还原||Ultra-precision polishing is an emerging technology for the fabrication of high precision and high quality optical surface of freeform. It is capable of overcoming the shortcomings of other ultra-precision freeform machining technologies, such as the low machining efficiency and non-ferrous materials limitations for ultra-precision raster milling and fast tool servo machining. However, our understanding of the surface generation mechanisms in ultra-precision polishing is far from complete. As a result, an experimental study of the effect of machining strategy on the surface generation in ultra-precision polishing was presented in this paper. A series of polishing experiments had been done. It is interesting to find that the quality of the polished surface heavily relies on a proper selection of process conditions and polishing strategies. The polishing process was not only found to be useful for removing the undesirable machine marks produced by other machining processes but also be able to generate preferred structure texture for functional applications. The results of the study provide an important means for better understanding of the surface generation as well as the strategy for the optimization of the surface quality in ultra-precision polishing of freeform.