Keyphrases
Filtered Cathodic Vacuum Arc
100%
Optical Properties
100%
Oxide Thin Films
100%
Zirconium Oxide
100%
Oxygen Flow Rate
100%
Optical Constants
40%
Deposition Rate
20%
Film Structure
20%
Extinction Coefficient
20%
As-deposited Films
20%
Optical Band Gap
20%
Si (100) Substrate
20%
Off-plane
20%
Structure Change
20%
High Refractive Index
20%
Structural Inhomogeneity
20%
Quartz Substrate
20%
Amorphous Zirconia
20%
High Transmittance
20%
Highest Good
20%
Homogeneous Structure
20%
N-Si
20%
Transmittance
20%
Optical Homogeneity
20%
External Heating
20%
Zirconium Oxide Films
20%
Engineering
Flow Rate
100%
Thin Films
100%
Flow Velocity
100%
Deposited Film
40%
Oxide Film
20%
Structural Homogeneity
20%
Refractive Index
20%
Extinction Coefficient
20%
Deposition Rate
20%
Silicon Dioxide
20%
Band Gap
20%
Refractivity
20%
Optical Film
20%
Material Science
Zirconia
100%
Film
100%
Optical Property
100%
Thin Films
100%
Refractive Index
25%
Cathode
25%
Optical Film
25%
Oxide Film
25%