Optical MEMS switch control and packaging

H. Cai; J. H. Wu; L. J; Xuming Zhang; Y. X. Wang; Chao Lu; A. Q. Liu

doi:10.1109/EPTC.2003.1271531

Optical MEMS switch control and packaging

H. Cai, J. H. Wu, L. J, Xuming Zhang, Y. X. Wang, Chao Lu, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

1 Citation (Scopus)

Abstract

A MEMS switch which is packaged with electronic control modules has been developed and is presented in this paper. The switch consists of a comb-drive actuator and a micro-mirror which is interposed between two input/output fibers. All these are combined with the electronic control system. The main function of the MEMS switch is to control the optical path connection. It also provides the on-state and off-state function. The optical switch which uses proportional integral derivative (PID) control has a quicker switching time of 0.31 ms. The insertion loss is 1.2 dB at 1550 nm wavelength. This optical MEMS switch, which provides high reliability and stability of the set point tracking, is designed using the controller based on the experimental results.

Original language	English
Title of host publication	Proceedings of 5th Electronics Packaging Technology Conference, EPTC 2003
Publisher	IEEE
Pages	291-293
Number of pages	3
ISBN (Electronic)	0780382056, 9780780382053
DOIs	https://doi.org/10.1109/EPTC.2003.1271531
Publication status	Published - 1 Jan 2003
Externally published	Yes
Event	5th Electronics Packaging Technology Conference, EPTC 2003 - Pan Pacific Hotel, Singapore, Singapore Duration: 10 Dec 2003 → 12 Dec 2003

Conference

Conference	5th Electronics Packaging Technology Conference, EPTC 2003
Country/Territory	Singapore
City	Singapore
Period	10/12/03 → 12/12/03

ASJC Scopus subject areas

Electrical and Electronic Engineering
Industrial and Manufacturing Engineering
Electronic, Optical and Magnetic Materials

More information

10.1109/EPTC.2003.1271531

Cite this

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title = "Optical MEMS switch control and packaging",

abstract = "A MEMS switch which is packaged with electronic control modules has been developed and is presented in this paper. The switch consists of a comb-drive actuator and a micro-mirror which is interposed between two input/output fibers. All these are combined with the electronic control system. The main function of the MEMS switch is to control the optical path connection. It also provides the on-state and off-state function. The optical switch which uses proportional integral derivative (PID) control has a quicker switching time of 0.31 ms. The insertion loss is 1.2 dB at 1550 nm wavelength. This optical MEMS switch, which provides high reliability and stability of the set point tracking, is designed using the controller based on the experimental results.",

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AU - Cai, H.

AU - Wu, J. H.

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AU - Zhang, Xuming

AU - Wang, Y. X.

AU - Lu, Chao

AU - Liu, A. Q.

PY - 2003/1/1

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N2 - A MEMS switch which is packaged with electronic control modules has been developed and is presented in this paper. The switch consists of a comb-drive actuator and a micro-mirror which is interposed between two input/output fibers. All these are combined with the electronic control system. The main function of the MEMS switch is to control the optical path connection. It also provides the on-state and off-state function. The optical switch which uses proportional integral derivative (PID) control has a quicker switching time of 0.31 ms. The insertion loss is 1.2 dB at 1550 nm wavelength. This optical MEMS switch, which provides high reliability and stability of the set point tracking, is designed using the controller based on the experimental results.

AB - A MEMS switch which is packaged with electronic control modules has been developed and is presented in this paper. The switch consists of a comb-drive actuator and a micro-mirror which is interposed between two input/output fibers. All these are combined with the electronic control system. The main function of the MEMS switch is to control the optical path connection. It also provides the on-state and off-state function. The optical switch which uses proportional integral derivative (PID) control has a quicker switching time of 0.31 ms. The insertion loss is 1.2 dB at 1550 nm wavelength. This optical MEMS switch, which provides high reliability and stability of the set point tracking, is designed using the controller based on the experimental results.

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DO - 10.1109/EPTC.2003.1271531

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BT - Proceedings of 5th Electronics Packaging Technology Conference, EPTC 2003

PB - IEEE

T2 - 5th Electronics Packaging Technology Conference, EPTC 2003

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ER -

Optical MEMS switch control and packaging

Abstract

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ASJC Scopus subject areas

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