Optical MEMS switch control and packaging

H. Cai, J. H. Wu, L. J, Xuming Zhang, Y. X. Wang, Chao Lu, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

1 Citation (Scopus)


A MEMS switch which is packaged with electronic control modules has been developed and is presented in this paper. The switch consists of a comb-drive actuator and a micro-mirror which is interposed between two input/output fibers. All these are combined with the electronic control system. The main function of the MEMS switch is to control the optical path connection. It also provides the on-state and off-state function. The optical switch which uses proportional integral derivative (PID) control has a quicker switching time of 0.31 ms. The insertion loss is 1.2 dB at 1550 nm wavelength. This optical MEMS switch, which provides high reliability and stability of the set point tracking, is designed using the controller based on the experimental results.
Original languageEnglish
Title of host publicationProceedings of 5th Electronics Packaging Technology Conference, EPTC 2003
Number of pages3
ISBN (Electronic)0780382056, 9780780382053
Publication statusPublished - 1 Jan 2003
Externally publishedYes
Event5th Electronics Packaging Technology Conference, EPTC 2003 - Pan Pacific Hotel, Singapore, Singapore
Duration: 10 Dec 200312 Dec 2003


Conference5th Electronics Packaging Technology Conference, EPTC 2003

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Electronic, Optical and Magnetic Materials


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