Abstract
Miniature optical fiber-tip sensors based on directly μ-printed polymer suspended-microbea ms are presented. With an in-house optical 3D μ-printing technology, SU-8 suspended-microbeams are fabricated in situ to form Fabry-Pérot (FP) micro-interferometers on the end face of standard single-mode optical fiber. Optical reflection spectra of the fabricated FP micro-interferometers are measured and fast Fourier transform is applied to analyze the cavity of micro-interferometers. The applications of the optical fiber-tip sensors for refractive index (RI) sensing and pressure sensing, which showed 917.3 nm/RIU to RI change and 4.29 nm/MPa to pressure change, respectively, are demonstrated in the experiments. The sensors and their optical μ-printing method unveil a new strategy to integrate complicated microcomponents on optical fibers toward ‘lab-on-fiber’ devices and applications.
Original language | English |
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Pages (from-to) | 1825 |
Journal | Sensors (Switzerland) |
Volume | 18 |
Issue number | 6 |
DOIs | |
Publication status | Published - 5 Jun 2018 |