Optical and mechanical models for a variable optical attenuator using a micromirror drawbridge

A. Q. Liu; Xuming Zhang; Chao Lu; F. Wang; C. Lu; Z. S. Liu

doi:10.1088/0960-1317/13/3/308

Optical and mechanical models for a variable optical attenuator using a micromirror drawbridge

A. Q. Liu, Xuming Zhang, Chao Lu, F. Wang, C. Lu, Z. S. Liu

Research output: Journal article publication › Journal article › Academic research › peer-review

51 Citations (Scopus)

Abstract

In this paper, we develop optical and mechanical models of a surface micromachined variable optical attenuator (VOA) having an initial tilt angle. The proposed models are employed to compare various characteristics of the VOA such as snap-down voltage, attenuation versus driving voltage, and the rise time and the fall time based on the experimental data. In addition, the analytical models of the static and dynamic behavior of the drawbridge are verified using the results from the finite element method. We obtain reasonable accuracy between the results from the experiment and the proposed models.

Original language	English
Pages (from-to)	400-411
Number of pages	12
Journal	Journal of Micromechanics and Microengineering
Volume	13
Issue number	3
DOIs	https://doi.org/10.1088/0960-1317/13/3/308
Publication status	Published - 1 May 2003
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/13/3/308

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AU - Liu, Z. S.

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AB - In this paper, we develop optical and mechanical models of a surface micromachined variable optical attenuator (VOA) having an initial tilt angle. The proposed models are employed to compare various characteristics of the VOA such as snap-down voltage, attenuation versus driving voltage, and the rise time and the fall time based on the experimental data. In addition, the analytical models of the static and dynamic behavior of the drawbridge are verified using the results from the finite element method. We obtain reasonable accuracy between the results from the experiment and the proposed models.

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ER -

Optical and mechanical models for a variable optical attenuator using a micromirror drawbridge

Abstract

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