Optical and ferromagnetic characteristics of Mn doped ZnO thin films grown by filtered cathodic vacuum arc technique

H. K. Liang, Siu Fung Yu, Shu Ping Lau, T. S. Herng, S. H. Tsang, L. Wang, J. S. Chen, K. S. Teng

Research output: Journal article publicationJournal articleAcademic researchpeer-review

4 Citations (Scopus)


Mn doped ZnO (ZnO:Mn) thin films with ∼ 10 at.% of Mn were grown on quartz substrates by filtered cathodic vacuum arc (FCVA) technique at low substrate temperature (≤ 200 °C). The influence of substrate temperature and oxygen flow rate on the optical, electrical and magnetic properties of the ZnO:Mn thin films was studied. Both room temperature ferromagnetism and ultraviolet photoluminescence were observed in all films. A maximum saturation moment of 2.9 × 10-24A m2/Mn can be achieved for the films grown in an optimum condition. This suggests that the fabrication of high-quality AR ZnO:Mn films by FCVA technique has the potential to realize efficient magneto-optic devices operating at ultraviolet regime.
Original languageEnglish
Pages (from-to)7048-7052
Number of pages5
JournalThin Solid Films
Issue number23
Publication statusPublished - 30 Sep 2010


  • Filtered cathodic vacuum arc
  • Magneto-optical properties
  • Photoluminescence
  • Thin films
  • ZnO:metal

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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