Optical and ferromagnetic characteristics of Mn doped ZnO thin films grown by filtered cathodic vacuum arc technique

H. K. Liang; Siu Fung Yu; Shu Ping Lau; T. S. Herng; S. H. Tsang; L. Wang; J. S. Chen; K. S. Teng

doi:10.1016/j.tsf.2010.06.062

Optical and ferromagnetic characteristics of Mn doped ZnO thin films grown by filtered cathodic vacuum arc technique

H. K. Liang, Siu Fung Yu, Shu Ping Lau, T. S. Herng, S. H. Tsang, L. Wang, J. S. Chen, K. S. Teng

The Hong Kong Polytechnic University

Research output: Journal article publication › Journal article › Academic research › peer-review

4 Citations (Scopus)

Abstract

Mn doped ZnO (ZnO:Mn) thin films with ∼ 10 at.% of Mn were grown on quartz substrates by filtered cathodic vacuum arc (FCVA) technique at low substrate temperature (≤ 200 °C). The influence of substrate temperature and oxygen flow rate on the optical, electrical and magnetic properties of the ZnO:Mn thin films was studied. Both room temperature ferromagnetism and ultraviolet photoluminescence were observed in all films. A maximum saturation moment of 2.9 × 10-24A m2/Mn can be achieved for the films grown in an optimum condition. This suggests that the fabrication of high-quality AR ZnO:Mn films by FCVA technique has the potential to realize efficient magneto-optic devices operating at ultraviolet regime.

Original language	English
Pages (from-to)	7048-7052
Number of pages	5
Journal	Thin Solid Films
Volume	518
Issue number	23
DOIs	https://doi.org/10.1016/j.tsf.2010.06.062
Publication status	Published - 30 Sept 2010

Keywords

Filtered cathodic vacuum arc
Magneto-optical properties
Photoluminescence
Thin films
ZnO:metal

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

More information

10.1016/j.tsf.2010.06.062

Cite this

@article{58d6501be09c438da960035f6ed84cfb,

title = "Optical and ferromagnetic characteristics of Mn doped ZnO thin films grown by filtered cathodic vacuum arc technique",

abstract = "Mn doped ZnO (ZnO:Mn) thin films with ∼ 10 at.% of Mn were grown on quartz substrates by filtered cathodic vacuum arc (FCVA) technique at low substrate temperature (≤ 200 °C). The influence of substrate temperature and oxygen flow rate on the optical, electrical and magnetic properties of the ZnO:Mn thin films was studied. Both room temperature ferromagnetism and ultraviolet photoluminescence were observed in all films. A maximum saturation moment of 2.9 × 10-24A m2/Mn can be achieved for the films grown in an optimum condition. This suggests that the fabrication of high-quality AR ZnO:Mn films by FCVA technique has the potential to realize efficient magneto-optic devices operating at ultraviolet regime.",

keywords = "Filtered cathodic vacuum arc, Magneto-optical properties, Photoluminescence, Thin films, ZnO:metal",

author = "Liang, {H. K.} and Yu, {Siu Fung} and Lau, {Shu Ping} and Herng, {T. S.} and Tsang, {S. H.} and L. Wang and Chen, {J. S.} and Teng, {K. S.}",

year = "2010",

month = sep,

day = "30",

doi = "10.1016/j.tsf.2010.06.062",

language = "English",

volume = "518",

pages = "7048--7052",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "23",

}

TY - JOUR

T1 - Optical and ferromagnetic characteristics of Mn doped ZnO thin films grown by filtered cathodic vacuum arc technique

AU - Liang, H. K.

AU - Yu, Siu Fung

AU - Lau, Shu Ping

AU - Herng, T. S.

AU - Tsang, S. H.

AU - Wang, L.

AU - Chen, J. S.

AU - Teng, K. S.

PY - 2010/9/30

Y1 - 2010/9/30

N2 - Mn doped ZnO (ZnO:Mn) thin films with ∼ 10 at.% of Mn were grown on quartz substrates by filtered cathodic vacuum arc (FCVA) technique at low substrate temperature (≤ 200 °C). The influence of substrate temperature and oxygen flow rate on the optical, electrical and magnetic properties of the ZnO:Mn thin films was studied. Both room temperature ferromagnetism and ultraviolet photoluminescence were observed in all films. A maximum saturation moment of 2.9 × 10-24A m2/Mn can be achieved for the films grown in an optimum condition. This suggests that the fabrication of high-quality AR ZnO:Mn films by FCVA technique has the potential to realize efficient magneto-optic devices operating at ultraviolet regime.

AB - Mn doped ZnO (ZnO:Mn) thin films with ∼ 10 at.% of Mn were grown on quartz substrates by filtered cathodic vacuum arc (FCVA) technique at low substrate temperature (≤ 200 °C). The influence of substrate temperature and oxygen flow rate on the optical, electrical and magnetic properties of the ZnO:Mn thin films was studied. Both room temperature ferromagnetism and ultraviolet photoluminescence were observed in all films. A maximum saturation moment of 2.9 × 10-24A m2/Mn can be achieved for the films grown in an optimum condition. This suggests that the fabrication of high-quality AR ZnO:Mn films by FCVA technique has the potential to realize efficient magneto-optic devices operating at ultraviolet regime.

KW - Filtered cathodic vacuum arc

KW - Magneto-optical properties

KW - Photoluminescence

KW - Thin films

KW - ZnO:metal

UR - http://www.scopus.com/inward/record.url?scp=77956231551&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2010.06.062

DO - 10.1016/j.tsf.2010.06.062

M3 - Journal article

SN - 0040-6090

VL - 518

SP - 7048

EP - 7052

JO - Thin Solid Films

JF - Thin Solid Films

IS - 23

ER -

Optical and ferromagnetic characteristics of Mn doped ZnO thin films grown by filtered cathodic vacuum arc technique

Abstract

Keywords

ASJC Scopus subject areas

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