Optical 3D μ-printing of ferrule-top polymer suspended-mirror devices

Mian Yao, Ping Kong Alexander Wai, Jushuai Wu, Aping Zhang, Hwa Yaw Tam

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

We present a novel optical printing technology for rapid fabrication of polymer suspended-mirror devices (SMDs) on the end surface of a ferrule of optical fiber connector. With the own-developed 3D μ-printing technology, three kinds of ferrule-top SMDs have been rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SU-8 SMDs are measured. The application of SMDs as a highly sensitive displacement sensor is experimentally demonstrated.
Original languageEnglish
Title of host publicationIEEE Sensors, SENSORS 2016 - Proceedings
PublisherIEEE
ISBN (Electronic)9781479982875
DOIs
Publication statusPublished - 5 Jan 2017
Event15th IEEE Sensors Conference, SENSORS 2016 - Convention Center at the Caribe Royale Hotel, Orlando, United States
Duration: 30 Oct 20162 Nov 2016

Conference

Conference15th IEEE Sensors Conference, SENSORS 2016
Country/TerritoryUnited States
CityOrlando
Period30/10/162/11/16

Keywords

  • 3D printed sensor
  • optical microfabrication
  • suspended-mirror device

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this