Abstract
We present a novel optical printing technology for rapid fabrication of polymer suspended-mirror devices (SMDs) on the end surface of a ferrule of optical fiber connector. With the own-developed 3D μ-printing technology, three kinds of ferrule-top SMDs have been rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SU-8 SMDs are measured. The application of SMDs as a highly sensitive displacement sensor is experimentally demonstrated.
Original language | English |
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Title of host publication | IEEE Sensors, SENSORS 2016 - Proceedings |
Publisher | IEEE |
ISBN (Electronic) | 9781479982875 |
DOIs | |
Publication status | Published - 5 Jan 2017 |
Event | 15th IEEE Sensors Conference, SENSORS 2016 - Convention Center at the Caribe Royale Hotel, Orlando, United States Duration: 30 Oct 2016 → 2 Nov 2016 |
Conference
Conference | 15th IEEE Sensors Conference, SENSORS 2016 |
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Country/Territory | United States |
City | Orlando |
Period | 30/10/16 → 2/11/16 |
Keywords
- 3D printed sensor
- optical microfabrication
- suspended-mirror device
ASJC Scopus subject areas
- Electrical and Electronic Engineering