Open vs. closed-loop control of the MEMS electrostatic comb drive

Keyphrases

• Electrostatic Comb Drive 100%
• Closed-loop Control 100%
• Closed-loop Approach 100%
• Input Signals 50%
• Optical Sensor 50%
• Parameter Identification 50%
• Description Model 50%
• Comb-drive Actuator 50%
• Comb-drive 50%
• Loop Technique 50%
• Signal Shaping 50%
• Input Shaping 50%
• Actual Device 50%

Engineering

• Open Loop 100%
• Closed Loop Control 100%
• Closed Loop 100%
• Microelectromechanical System 100%
• Experimental Result 50%
• Simulation Result 50%
• Input Signal 50%
• Optical Sensors 50%
• Comb Drive Actuator 50%