Open vs. closed-loop control of the MEMS electrostatic comb drive

B. Borovic, C. Hong, Xuming Zhang, A. Q. Liu, F. L. Lewis

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

15 Citations (Scopus)

Abstract

The purpose of this paper is to address the issue of driving the very small scale (1.5×1mm) comb drive (actuator). Two approaches are available, input signal shaping approach that drives the comb drive in open loop, and a closed loop approach. Position is measured by optical sensor. We compare the two approaches using both experimental and simulation results. First, the description, model, and experimental setup of the actual device are given. It is followed by simple parameter identification. Input shaping open-loop techniques are addressed first. It is followed by closed-loop approach. Finally, the comparison between two approaches, sensitivity issues, and reflections on the design of the device itself are given.
Original languageEnglish
Title of host publicationProceedings of the 20th IEEE International Symposium on Intelligent Control, ISIC '05 and the 13th Mediterranean Conference on Control and Automation, MED '05
Pages982-988
Number of pages7
Volume2005
DOIs
Publication statusPublished - 1 Dec 2005
Externally publishedYes
Event20th IEEE International Symposium on Intelligent Control, ISIC '05 and the13th Mediterranean Conference on Control and Automation, MED '05 - Limassol, Cyprus
Duration: 27 Jun 200529 Jun 2005

Conference

Conference20th IEEE International Symposium on Intelligent Control, ISIC '05 and the13th Mediterranean Conference on Control and Automation, MED '05
CountryCyprus
CityLimassol
Period27/06/0529/06/05

Keywords

  • Control
  • Electrostatic comb drive actuator
  • Feedback
  • Input shaping
  • MEMS
  • Modeling

ASJC Scopus subject areas

  • Engineering(all)

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