Open vs. closed-loop control of the MEMS electrostatic comb drive

B. Borovic; C. Hong; Xuming Zhang; A. Q. Liu; F. L. Lewis

doi:10.1109/.2005.1467147

Open vs. closed-loop control of the MEMS electrostatic comb drive

B. Borovic, C. Hong, Xuming Zhang, A. Q. Liu, F. L. Lewis

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

16 Citations (Scopus)

Abstract

The purpose of this paper is to address the issue of driving the very small scale (1.5×1mm) comb drive (actuator). Two approaches are available, input signal shaping approach that drives the comb drive in open loop, and a closed loop approach. Position is measured by optical sensor. We compare the two approaches using both experimental and simulation results. First, the description, model, and experimental setup of the actual device are given. It is followed by simple parameter identification. Input shaping open-loop techniques are addressed first. It is followed by closed-loop approach. Finally, the comparison between two approaches, sensitivity issues, and reflections on the design of the device itself are given.

Original language	English
Title of host publication	Proceedings of the 20th IEEE International Symposium on Intelligent Control, ISIC '05 and the 13th Mediterranean Conference on Control and Automation, MED '05
Pages	982-988
Number of pages	7
Volume	2005
DOIs	https://doi.org/10.1109/.2005.1467147
Publication status	Published - 1 Dec 2005
Externally published	Yes
Event	20th IEEE International Symposium on Intelligent Control, ISIC '05 and the13th Mediterranean Conference on Control and Automation, MED '05 - Limassol, Cyprus Duration: 27 Jun 2005 → 29 Jun 2005

Conference

Conference	20th IEEE International Symposium on Intelligent Control, ISIC '05 and the13th Mediterranean Conference on Control and Automation, MED '05
Country/Territory	Cyprus
City	Limassol
Period	27/06/05 → 29/06/05

Keywords

Control
Electrostatic comb drive actuator
Feedback
Input shaping
MEMS
Modeling

ASJC Scopus subject areas

Engineering(all)

More information

10.1109/.2005.1467147

Cite this

Borovic, B., Hong, C., Zhang, X., Liu, A. Q., & Lewis, F. L. (2005). Open vs. closed-loop control of the MEMS electrostatic comb drive. In Proceedings of the 20th IEEE International Symposium on Intelligent Control, ISIC '05 and the 13th Mediterranean Conference on Control and Automation, MED '05 (Vol. 2005, pp. 982-988). Article 1467147 https://doi.org/10.1109/.2005.1467147

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abstract = "The purpose of this paper is to address the issue of driving the very small scale (1.5×1mm) comb drive (actuator). Two approaches are available, input signal shaping approach that drives the comb drive in open loop, and a closed loop approach. Position is measured by optical sensor. We compare the two approaches using both experimental and simulation results. First, the description, model, and experimental setup of the actual device are given. It is followed by simple parameter identification. Input shaping open-loop techniques are addressed first. It is followed by closed-loop approach. Finally, the comparison between two approaches, sensitivity issues, and reflections on the design of the device itself are given.",

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booktitle = "Proceedings of the 20th IEEE International Symposium on Intelligent Control, ISIC '05 and the 13th Mediterranean Conference on Control and Automation, MED '05",

note = "20th IEEE International Symposium on Intelligent Control, ISIC '05 and the13th Mediterranean Conference on Control and Automation, MED '05 ; Conference date: 27-06-2005 Through 29-06-2005",

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Borovic, B, Hong, C, Zhang, X, Liu, AQ & Lewis, FL 2005, Open vs. closed-loop control of the MEMS electrostatic comb drive. in Proceedings of the 20th IEEE International Symposium on Intelligent Control, ISIC '05 and the 13th Mediterranean Conference on Control and Automation, MED '05. vol. 2005, 1467147, pp. 982-988, 20th IEEE International Symposium on Intelligent Control, ISIC '05 and the13th Mediterranean Conference on Control and Automation, MED '05, Limassol, Cyprus, 27/06/05. https://doi.org/10.1109/.2005.1467147

Open vs. closed-loop control of the MEMS electrostatic comb drive. / Borovic, B.; Hong, C.; Zhang, Xuming et al.
Proceedings of the 20th IEEE International Symposium on Intelligent Control, ISIC '05 and the 13th Mediterranean Conference on Control and Automation, MED '05. Vol. 2005 2005. p. 982-988 1467147.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AU - Hong, C.

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KW - Control

KW - Electrostatic comb drive actuator

KW - Feedback

KW - Input shaping

KW - MEMS

KW - Modeling

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Y2 - 27 June 2005 through 29 June 2005

ER -

Open vs. closed-loop control of the MEMS electrostatic comb drive

Abstract

Conference

Keywords

ASJC Scopus subject areas

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