Keyphrases
Brittle Materials
100%
Micro-optics
100%
Structured Surface
100%
Ultra-precision Raster Milling
100%
Hybrid Structure
100%
Infrared Materials
66%
Ultra-precision
33%
Micro-nano Structure
33%
Primary Surface
33%
Side Milling
33%
Forming Accuracy
16%
Optical Components
16%
Machining Parameters
16%
Workpiece Material
16%
Tool Path Generation
16%
Ductile Mode
16%
Diffractive
16%
Brittle Fracture
16%
Aspheric
16%
Multicrystalline Silicon
16%
Brittle Nature
16%
Diffraction Characteristics
16%
Sinusoid
16%
Phase Grating
16%
Non-mechanical
16%
Mechanical Technology
16%
Function Integration
16%
Cutting Trajectory
16%
Infrared Optical System
16%
Selecting Criteria
16%
Function Minimization
16%
Deterministic Fabrication
16%
Higher Forms
16%
Flexible Method
16%
Engineering
One Step
100%
Structured Surface
100%
Brittleness
100%
Nanomaterial
66%
Primary Surface
66%
Form Accuracy
33%
Machining Parameter
33%
Silicon Single Crystal
33%
Ductile Mode
33%
Brittle Fracture
33%
Desired Shape
33%
Optical Systems
33%
Refractive
33%
Material Science
Surface (Surface Science)
100%
Brittleness
100%
Nanostructure
66%
Machining
33%
Brittle Fracture
33%
Silicon
33%
Single Crystal
33%
Physics
Micro Optics
100%
Brittleness
100%
Nanomaterial
33%
Sine Wave
16%
Brittle Fracture
16%
Single Crystal
16%