On the Measurement of Parasitic Capacitances of Device with More Than Two External Terminals Using an LCR Meter

Keyphrases

• Measurement Accuracy 100%
• Parasitic Capacitance 100%
• LCR Meter 100%
• MOSFET Structure 66%
• Capacitance 33%
• Two-terminal 33%
• Silicon-on-insulator MOSFETs 33%
• Internal Structure 33%
• Bulk Silicon 33%
• Well Resistance 33%
• Direct Measurement 33%
• Substrate Resistance 33%
• Silicon MOSFET 33%
• Floating Substrate 33%

Engineering

• Parasitic Capacitance 100%
• Metal-Oxide-Semiconductor Field-Effect Transistor 66%
• Bulk Silicon 33%
• Internal Structure 33%
• Silicon on Insulator 33%
• Limiting Factor 33%