On the Measurement of Parasitic Capacitances of Device with More Than Two External Terminals Using an LCR Meter

Wallece W. Lin, Philip Ching Ho Chan

Research output: Journal article publicationJournal articleAcademic researchpeer-review

11 Citations (Scopus)


A general methodology of directly measuring parasitic capacitance using an LCR meter in devices with more than two terminals is discussed. It is concluded that the accuracy of the measurement cannot be guaranteed in such devices since it is dependent on the internal structure of the device. This is demonstrated using the conventional (bulk silicon) MOSFET structure, showing that substrate or well resistance could be the dominant factor limiting measurement accuracy of parasitic capacitances, such as gate-to-drain (source), drain-to-source, drain (source)-to-substrate (well) capacitances. We also conclude that for the silicon-on-insulator (SOI) MOSFET structure, a direct and accurate measurement is difficult to achieve, since the measurement accuracy is impeded by the floating substrate in the structure.
Original languageEnglish
Pages (from-to)2573-2575
Number of pages3
JournalIEEE Transactions on Electron Devices
Issue number11
Publication statusPublished - 1 Jan 1991
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)

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