Fingerprint
Dive into the research topics of 'On the deposition mechanism of a-C:H films by plasma enhanced chemical vapor deposition'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
On the deposition mechanism of a-C:H films by plasma enhanced chemical vapor deposition
Y. H. Cheng, Y. P. Wu, J. G. Chen, X. L. Qiao, C. S. Xie, B. K. Tay, Shu Ping Lau, X. Shi
Research output: Journal article publication › Journal article › Academic research › peer-review
36
Citations
(Scopus)