On the deposition mechanism of a-C:H films by plasma enhanced chemical vapor deposition
- Y. H. Cheng
- , Y. P. Wu
- , J. G. Chen
- , X. L. Qiao
- , C. S. Xie
- , B. K. Tay
- , Shu Ping Lau
- , X. Shi
Research output: Journal article publication › Journal article › Academic research › peer-review
41
Link opens in a new tab
Citations
(Scopus)