On-chip optical power measurement by optical force

J. F. Tao; H. Cai; A. B. Yu; W. M. Zhu; Q. X. Zhang; J. Wu; K. Xu; J. T. Lin; G. Q. Lo; D. L. Kwong; A. Q. Liu

doi:10.1109/TRANSDUCERS.2011.5969720

On-chip optical power measurement by optical force

J. F. Tao
, H. Cai
, A. B. Yu
, W. M. Zhu
, Q. X. Zhang
, J. Wu
, K. Xu
, J. T. Lin
, G. Q. Lo
, D. L. Kwong
, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

1 Citation (Scopus)

Abstract

This paper reports a silicon-based micromachined optical power detector with on-chip measurement ability. The optical power is detected by an integrated electron-tunneling displacement transducer, in which optical force is employed as the bridge between optical energy and mechanical energy transition. Compared with the traditional optical power detectors, which are based on photo absorption, the proposed optical power detector has advantages of small size (0.08 mm × 0.3 mm), low thermal noise (0.03 V/°C), large measurement range (> 20 mW) and wavelength independence. Therefore, it has potential applications as high-speed detecting element in silicon-based photonic chips and lab-on-chip systems.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	1911-1914
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969720
Publication status	Published - Jun 2011
Externally published	Yes
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Keywords

on-chip measurement
Optical detection
optical force
tunneling sensor

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

More information

10.1109/TRANSDUCERS.2011.5969720

Cite this

Tao, J. F., Cai, H., Yu, A. B., Zhu, W. M., Zhang, Q. X., Wu, J., Xu, K., Lin, J. T., Lo, G. Q., Kwong, D. L., & Liu, A. Q. (2011). On-chip optical power measurement by optical force. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1911-1914). Article 5969720 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969720

@inproceedings{937da1fa60e54f598a11fd5ef6a7841d,

title = "On-chip optical power measurement by optical force",

abstract = "This paper reports a silicon-based micromachined optical power detector with on-chip measurement ability. The optical power is detected by an integrated electron-tunneling displacement transducer, in which optical force is employed as the bridge between optical energy and mechanical energy transition. Compared with the traditional optical power detectors, which are based on photo absorption, the proposed optical power detector has advantages of small size (0.08 mm × 0.3 mm), low thermal noise (0.03 V/°C), large measurement range (> 20 mW) and wavelength independence. Therefore, it has potential applications as high-speed detecting element in silicon-based photonic chips and lab-on-chip systems.",

keywords = "on-chip measurement, Optical detection, optical force, tunneling sensor",

author = "Tao, \{J. F.\} and H. Cai and Yu, \{A. B.\} and Zhu, \{W. M.\} and Zhang, \{Q. X.\} and J. Wu and K. Xu and Lin, \{J. T.\} and Lo, \{G. Q.\} and Kwong, \{D. L.\} and Liu, \{A. Q.\}",

year = "2011",

month = jun,

doi = "10.1109/TRANSDUCERS.2011.5969720",

language = "English",

isbn = "9781457701573",

series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

pages = "1911--1914",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

}

Tao, JF, Cai, H, Yu, AB, Zhu, WM, Zhang, QX, Wu, J, Xu, K, Lin, JT, Lo, GQ, Kwong, DL & Liu, AQ 2011, On-chip optical power measurement by optical force. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969720, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 1911-1914, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969720

On-chip optical power measurement by optical force. / Tao, J. F.; Cai, H.; Yu, A. B. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1911-1914 5969720 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - On-chip optical power measurement by optical force

AU - Tao, J. F.

AU - Cai, H.

AU - Yu, A. B.

AU - Zhu, W. M.

AU - Zhang, Q. X.

AU - Wu, J.

AU - Xu, K.

AU - Lin, J. T.

AU - Lo, G. Q.

AU - Kwong, D. L.

AU - Liu, A. Q.

PY - 2011/6

Y1 - 2011/6

N2 - This paper reports a silicon-based micromachined optical power detector with on-chip measurement ability. The optical power is detected by an integrated electron-tunneling displacement transducer, in which optical force is employed as the bridge between optical energy and mechanical energy transition. Compared with the traditional optical power detectors, which are based on photo absorption, the proposed optical power detector has advantages of small size (0.08 mm × 0.3 mm), low thermal noise (0.03 V/°C), large measurement range (> 20 mW) and wavelength independence. Therefore, it has potential applications as high-speed detecting element in silicon-based photonic chips and lab-on-chip systems.

AB - This paper reports a silicon-based micromachined optical power detector with on-chip measurement ability. The optical power is detected by an integrated electron-tunneling displacement transducer, in which optical force is employed as the bridge between optical energy and mechanical energy transition. Compared with the traditional optical power detectors, which are based on photo absorption, the proposed optical power detector has advantages of small size (0.08 mm × 0.3 mm), low thermal noise (0.03 V/°C), large measurement range (> 20 mW) and wavelength independence. Therefore, it has potential applications as high-speed detecting element in silicon-based photonic chips and lab-on-chip systems.

KW - on-chip measurement

KW - Optical detection

KW - optical force

KW - tunneling sensor

UR - https://www.scopus.com/pages/publications/80052127325

U2 - 10.1109/TRANSDUCERS.2011.5969720

DO - 10.1109/TRANSDUCERS.2011.5969720

M3 - Conference article published in proceeding or book

AN - SCOPUS:80052127325

SN - 9781457701573

T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

SP - 1911

EP - 1914

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Y2 - 5 June 2011 through 9 June 2011

ER -

Tao JF, Cai H, Yu AB, Zhu WM, Zhang QX, Wu J et al. On-chip optical power measurement by optical force. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1911-1914. 5969720. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969720

On-chip optical power measurement by optical force

Abstract

Publication series

Conference

UN SDGs

Keywords

ASJC Scopus subject areas

More information

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