On-chip microwave filters on standard silicon substrate incorporating a low-k BCB dielectric layer

Lydia L.W. Leung; Kevin J. Chen; Xiao Huo; Philip Ching Ho Chan

doi:10.1109/EUMA.2002.339215

On-chip microwave filters on standard silicon substrate incorporating a low-k BCB dielectric layer

Lydia L.W. Leung, Kevin J. Chen, Xiao Huo, Philip Ching Ho Chan

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

5 Citations (Scopus)

Abstract

A low-loss, low-pass microstrip transmission line based microwave filter using 6-¿m low-k dielectric, Benzocyclobutene (BCB), as an interface layer has been fabricated on a standard CMOS grade silicon substrate. Standard 50-Ohm microstrip lines were fabricated and exhibit lower loss compared with the microtrip line on silicon without the BCB layer. The filter has a cut-off frequency at 10 GHz with an insertion loss of 1.1 dB. Simulation and measurement results of the filter are provided. Full-wave analysis of a 10 GHz bandpass filter is shown as well.

Original language	English
Title of host publication	2002 32nd European Microwave Conference, EuMC 2002
Publisher	IEEE Computer Society
DOIs	https://doi.org/10.1109/EUMA.2002.339215
Publication status	Published - 1 Jan 2002
Externally published	Yes
Event	2002 32nd European Microwave Conference, EuMC 2002 - Milan, Italy Duration: 23 Sept 2002 → 26 Sept 2002

Conference

Conference	2002 32nd European Microwave Conference, EuMC 2002
Country/Territory	Italy
City	Milan
Period	23/09/02 → 26/09/02

ASJC Scopus subject areas

Computer Networks and Communications
Hardware and Architecture
Electrical and Electronic Engineering

More information

10.1109/EUMA.2002.339215

Cite this

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abstract = "A low-loss, low-pass microstrip transmission line based microwave filter using 6-¿m low-k dielectric, Benzocyclobutene (BCB), as an interface layer has been fabricated on a standard CMOS grade silicon substrate. Standard 50-Ohm microstrip lines were fabricated and exhibit lower loss compared with the microtrip line on silicon without the BCB layer. The filter has a cut-off frequency at 10 GHz with an insertion loss of 1.1 dB. Simulation and measurement results of the filter are provided. Full-wave analysis of a 10 GHz bandpass filter is shown as well.",

author = "Leung, {Lydia L.W.} and Chen, {Kevin J.} and Xiao Huo and Chan, {Philip Ching Ho}",

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On-chip microwave filters on standard silicon substrate incorporating a low-k BCB dielectric layer. / Leung, Lydia L.W.; Chen, Kevin J.; Huo, Xiao et al.
2002 32nd European Microwave Conference, EuMC 2002. IEEE Computer Society, 2002. 4140295.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AU - Huo, Xiao

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N2 - A low-loss, low-pass microstrip transmission line based microwave filter using 6-¿m low-k dielectric, Benzocyclobutene (BCB), as an interface layer has been fabricated on a standard CMOS grade silicon substrate. Standard 50-Ohm microstrip lines were fabricated and exhibit lower loss compared with the microtrip line on silicon without the BCB layer. The filter has a cut-off frequency at 10 GHz with an insertion loss of 1.1 dB. Simulation and measurement results of the filter are provided. Full-wave analysis of a 10 GHz bandpass filter is shown as well.

AB - A low-loss, low-pass microstrip transmission line based microwave filter using 6-¿m low-k dielectric, Benzocyclobutene (BCB), as an interface layer has been fabricated on a standard CMOS grade silicon substrate. Standard 50-Ohm microstrip lines were fabricated and exhibit lower loss compared with the microtrip line on silicon without the BCB layer. The filter has a cut-off frequency at 10 GHz with an insertion loss of 1.1 dB. Simulation and measurement results of the filter are provided. Full-wave analysis of a 10 GHz bandpass filter is shown as well.

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DO - 10.1109/EUMA.2002.339215

M3 - Conference article published in proceeding or book

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T2 - 2002 32nd European Microwave Conference, EuMC 2002

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On-chip microwave filters on standard silicon substrate incorporating a low-k BCB dielectric layer

Abstract

Conference

ASJC Scopus subject areas

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