On-chip microwave filters on standard silicon substrate incorporating a low-k BCB dielectric layer

Lydia L.W. Leung, Kevin J. Chen, Xiao Huo, Philip Ching Ho Chan

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

4 Citations (Scopus)

Abstract

A low-loss, low-pass microstrip transmission line based microwave filter using 6-¿m low-k dielectric, Benzocyclobutene (BCB), as an interface layer has been fabricated on a standard CMOS grade silicon substrate. Standard 50-Ohm microstrip lines were fabricated and exhibit lower loss compared with the microtrip line on silicon without the BCB layer. The filter has a cut-off frequency at 10 GHz with an insertion loss of 1.1 dB. Simulation and measurement results of the filter are provided. Full-wave analysis of a 10 GHz bandpass filter is shown as well.
Original languageEnglish
Title of host publication2002 32nd European Microwave Conference, EuMC 2002
PublisherIEEE Computer Society
DOIs
Publication statusPublished - 1 Jan 2002
Externally publishedYes
Event2002 32nd European Microwave Conference, EuMC 2002 - Milan, Italy
Duration: 23 Sep 200226 Sep 2002

Conference

Conference2002 32nd European Microwave Conference, EuMC 2002
CountryItaly
CityMilan
Period23/09/0226/09/02

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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