On-chip CO2 Sensor Integrated with MEMS Emitter and Pyroelectric Detector

Hong Cai; Md Hazwani Khairy; Rachel Chen Fang Ang; Linfang Xu; Doris Keh Ting Ng; Nanxi Li; Zhonghua Gu; Anmin Kong; Weiguo Chen; Wen Wei Seit; Eva Wai Leong Ching; Norhanani Jaafar; Huanhuan Wang; Landobasa Y.M. Tobing; Leh Woon Lim; Qingxin Zhang; Lennon Yao Ting Lee

doi:10.1117/12.2650363

On-chip CO2 Sensor Integrated with MEMS Emitter and Pyroelectric Detector

Hong Cai, Md Hazwani Khairy, Rachel Chen Fang Ang, Linfang Xu, Doris Keh Ting Ng, Nanxi Li, Zhonghua Gu, Anmin Kong, Weiguo Chen, Wen Wei Seit, Eva Wai Leong Ching, Norhanani Jaafar, Huanhuan Wang, Landobasa Y.M. Tobing, Leh Woon Lim, Qingxin Zhang, Lennon Yao Ting Lee

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

A demonstration of an on-chip CO2 gas sensor is reported. It is constructed by the integration of a MEMS-based thermal emitter, a scandium-doped aluminum nitride (ScAlN) based pyroelectric detector, and a sensing channel built on Si substrate. The integrated sensor has a small footprint of 13mm × 3mm (L×W), achieved by the replacement of bulky bench-top mid-IR source and detectors with MEMS-based thermal emitter and ScAlN-based pyroelectric detector, with their footprints occupying 3.15 mm × 3 mm and 3.45 mm × 3 mm, respectively. In addition, the performance of the integrated sensor in detecting CO2 of various concentrations in N2 ambient is also studied. The results indicate that the pyroelectric detector responds linearly to the CO2 concentration. The integration of MEMS emitter, thermal pathway substrate, and pyroelectric detector, realized through CMOS compatible process, shows the potential for mass-deployment of gas sensors in environmental sensing networks.

Original language	English
Title of host publication	Silicon Photonics XVIII
Editors	Graham T. Reed, Andrew P. Knights
Publisher	SPIE
ISBN (Electronic)	9781510659575
DOIs	https://doi.org/10.1117/12.2650363
Publication status	Published - Feb 2023
Externally published	Yes
Event	Silicon Photonics XVIII 2023 - San Francisco, United States Duration: 30 Jan 2023 → 1 Feb 2023

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	12426
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Silicon Photonics XVIII 2023
Country/Territory	United States
City	San Francisco
Period	30/01/23 → 1/02/23

Keywords

Carbon dioxide
Gas sensor
MEMS emitter
Pyroelectric detector

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

More information

10.1117/12.2650363

Cite this

Cai, H., Khairy, M. H., Fang Ang, R. C., Xu, L., Ting Ng, D. K., Li, N., Gu, Z., Kong, A., Chen, W., Seit, W. W., Leong Ching, E. W., Jaafar, N., Wang, H., Tobing, L. Y. M., Lim, L. W., Zhang, Q., & Ting Lee, L. Y. (2023). On-chip CO2 Sensor Integrated with MEMS Emitter and Pyroelectric Detector. In G. T. Reed, & A. P. Knights (Eds.), Silicon Photonics XVIII Article 124260H (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12426). SPIE. https://doi.org/10.1117/12.2650363

@inproceedings{9c061c837ced43bca1512bb04941c76f,

title = "On-chip CO2 Sensor Integrated with MEMS Emitter and Pyroelectric Detector",

abstract = "A demonstration of an on-chip CO2 gas sensor is reported. It is constructed by the integration of a MEMS-based thermal emitter, a scandium-doped aluminum nitride (ScAlN) based pyroelectric detector, and a sensing channel built on Si substrate. The integrated sensor has a small footprint of 13mm × 3mm (L×W), achieved by the replacement of bulky bench-top mid-IR source and detectors with MEMS-based thermal emitter and ScAlN-based pyroelectric detector, with their footprints occupying 3.15 mm × 3 mm and 3.45 mm × 3 mm, respectively. In addition, the performance of the integrated sensor in detecting CO2 of various concentrations in N2 ambient is also studied. The results indicate that the pyroelectric detector responds linearly to the CO2 concentration. The integration of MEMS emitter, thermal pathway substrate, and pyroelectric detector, realized through CMOS compatible process, shows the potential for mass-deployment of gas sensors in environmental sensing networks.",

keywords = "Carbon dioxide, Gas sensor, MEMS emitter, Pyroelectric detector",

author = "Hong Cai and Khairy, {Md Hazwani} and {Fang Ang}, {Rachel Chen} and Linfang Xu and {Ting Ng}, {Doris Keh} and Nanxi Li and Zhonghua Gu and Anmin Kong and Weiguo Chen and Seit, {Wen Wei} and {Leong Ching}, {Eva Wai} and Norhanani Jaafar and Huanhuan Wang and Tobing, {Landobasa Y.M.} and Lim, {Leh Woon} and Qingxin Zhang and {Ting Lee}, {Lennon Yao}",

note = "Publisher Copyright: {\textcopyright} 2023 SPIE.; Silicon Photonics XVIII 2023 ; Conference date: 30-01-2023 Through 01-02-2023",

year = "2023",

month = feb,

doi = "10.1117/12.2650363",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Reed, {Graham T.} and Knights, {Andrew P.}",

booktitle = "Silicon Photonics XVIII",

address = "United States",

}

Cai, H, Khairy, MH, Fang Ang, RC, Xu, L, Ting Ng, DK, Li, N, Gu, Z, Kong, A, Chen, W, Seit, WW, Leong Ching, EW, Jaafar, N, Wang, H, Tobing, LYM, Lim, LW, Zhang, Q & Ting Lee, LY 2023, On-chip CO2 Sensor Integrated with MEMS Emitter and Pyroelectric Detector. in GT Reed & AP Knights (eds), Silicon Photonics XVIII., 124260H, Proceedings of SPIE - The International Society for Optical Engineering, vol. 12426, SPIE, Silicon Photonics XVIII 2023, San Francisco, United States, 30/01/23. https://doi.org/10.1117/12.2650363

On-chip CO2 Sensor Integrated with MEMS Emitter and Pyroelectric Detector. / Cai, Hong; Khairy, Md Hazwani; Fang Ang, Rachel Chen et al.
Silicon Photonics XVIII. ed. / Graham T. Reed; Andrew P. Knights. SPIE, 2023. 124260H (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12426).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - On-chip CO2 Sensor Integrated with MEMS Emitter and Pyroelectric Detector

AU - Cai, Hong

AU - Khairy, Md Hazwani

AU - Fang Ang, Rachel Chen

AU - Xu, Linfang

AU - Ting Ng, Doris Keh

AU - Li, Nanxi

AU - Gu, Zhonghua

AU - Kong, Anmin

AU - Chen, Weiguo

AU - Seit, Wen Wei

AU - Leong Ching, Eva Wai

AU - Jaafar, Norhanani

AU - Wang, Huanhuan

AU - Tobing, Landobasa Y.M.

AU - Lim, Leh Woon

AU - Zhang, Qingxin

AU - Ting Lee, Lennon Yao

PY - 2023/2

Y1 - 2023/2

N2 - A demonstration of an on-chip CO2 gas sensor is reported. It is constructed by the integration of a MEMS-based thermal emitter, a scandium-doped aluminum nitride (ScAlN) based pyroelectric detector, and a sensing channel built on Si substrate. The integrated sensor has a small footprint of 13mm × 3mm (L×W), achieved by the replacement of bulky bench-top mid-IR source and detectors with MEMS-based thermal emitter and ScAlN-based pyroelectric detector, with their footprints occupying 3.15 mm × 3 mm and 3.45 mm × 3 mm, respectively. In addition, the performance of the integrated sensor in detecting CO2 of various concentrations in N2 ambient is also studied. The results indicate that the pyroelectric detector responds linearly to the CO2 concentration. The integration of MEMS emitter, thermal pathway substrate, and pyroelectric detector, realized through CMOS compatible process, shows the potential for mass-deployment of gas sensors in environmental sensing networks.

AB - A demonstration of an on-chip CO2 gas sensor is reported. It is constructed by the integration of a MEMS-based thermal emitter, a scandium-doped aluminum nitride (ScAlN) based pyroelectric detector, and a sensing channel built on Si substrate. The integrated sensor has a small footprint of 13mm × 3mm (L×W), achieved by the replacement of bulky bench-top mid-IR source and detectors with MEMS-based thermal emitter and ScAlN-based pyroelectric detector, with their footprints occupying 3.15 mm × 3 mm and 3.45 mm × 3 mm, respectively. In addition, the performance of the integrated sensor in detecting CO2 of various concentrations in N2 ambient is also studied. The results indicate that the pyroelectric detector responds linearly to the CO2 concentration. The integration of MEMS emitter, thermal pathway substrate, and pyroelectric detector, realized through CMOS compatible process, shows the potential for mass-deployment of gas sensors in environmental sensing networks.

KW - Carbon dioxide

KW - Gas sensor

KW - MEMS emitter

KW - Pyroelectric detector

UR - http://www.scopus.com/inward/record.url?scp=85160319364&partnerID=8YFLogxK

U2 - 10.1117/12.2650363

DO - 10.1117/12.2650363

M3 - Conference article published in proceeding or book

AN - SCOPUS:85160319364

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Silicon Photonics XVIII

A2 - Reed, Graham T.

A2 - Knights, Andrew P.

PB - SPIE

T2 - Silicon Photonics XVIII 2023

Y2 - 30 January 2023 through 1 February 2023

ER -

On-chip CO2 Sensor Integrated with MEMS Emitter and Pyroelectric Detector

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