On-chip CO2 Sensor Integrated with MEMS Emitter and Pyroelectric Detector

Hong Cai, Md Hazwani Khairy, Rachel Chen Fang Ang, Linfang Xu, Doris Keh Ting Ng, Nanxi Li, Zhonghua Gu, Anmin Kong, Weiguo Chen, Wen Wei Seit, Eva Wai Leong Ching, Norhanani Jaafar, Huanhuan Wang, Landobasa Y.M. Tobing, Leh Woon Lim, Qingxin Zhang, Lennon Yao Ting Lee

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review


A demonstration of an on-chip CO2 gas sensor is reported. It is constructed by the integration of a MEMS-based thermal emitter, a scandium-doped aluminum nitride (ScAlN) based pyroelectric detector, and a sensing channel built on Si substrate. The integrated sensor has a small footprint of 13mm × 3mm (L×W), achieved by the replacement of bulky bench-top mid-IR source and detectors with MEMS-based thermal emitter and ScAlN-based pyroelectric detector, with their footprints occupying 3.15 mm × 3 mm and 3.45 mm × 3 mm, respectively. In addition, the performance of the integrated sensor in detecting CO2 of various concentrations in N2 ambient is also studied. The results indicate that the pyroelectric detector responds linearly to the CO2 concentration. The integration of MEMS emitter, thermal pathway substrate, and pyroelectric detector, realized through CMOS compatible process, shows the potential for mass-deployment of gas sensors in environmental sensing networks.

Original languageEnglish
Title of host publicationSilicon Photonics XVIII
EditorsGraham T. Reed, Andrew P. Knights
ISBN (Electronic)9781510659575
Publication statusPublished - Feb 2023
Externally publishedYes
EventSilicon Photonics XVIII 2023 - San Francisco, United States
Duration: 30 Jan 20231 Feb 2023

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceSilicon Photonics XVIII 2023
Country/TerritoryUnited States
CitySan Francisco


  • Carbon dioxide
  • Gas sensor
  • MEMS emitter
  • Pyroelectric detector

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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