TY - JOUR
T1 - Numerical Investigation on the Effects of Grain Size and Grinding Depth on Nano-Grinding of Cadmium Telluride Using Molecular Dynamics Simulation
AU - Liu, Changlin
AU - Yip, Wai Sze
AU - To, Suet
AU - Chen, Bolong
AU - Xu, Jianfeng
N1 - Funding Information:
The work described in this paper was partially supported by a grant from the General Research Fund from the Research Grants Council of the Hong Kong Special Administrative Region (Grant No. PolyU15221322); the major project of the National Natural Science Foundation of China (Project No. U19A20104); and the Shenzhen Science and Technology Program (Project No. JCYJ20210324131214039). The authors also would like to thank the financial support from the State Key Laboratory of Ultra-precision Machining Technology and the Research Committee of The Hong Kong Polytechnic University.
Publisher Copyright:
© 2023 by the authors.
PY - 2023/10
Y1 - 2023/10
N2 - Cadmium telluride (CdTe) is known as an important semiconductor material with favorable physical properties. However, as a soft-brittle material, the fabrication of high-quality surfaces on CdTe is quite challenging. To improve the fundamental understanding of the nanoscale deformation mechanisms of CdTe, in this paper, MD simulation was performed to explore the nano-grinding process of CdTe with consideration of the effects of grain size and grinding depth. The simulation results indicate that during nano-grinding, the dominant grinding mechanism could switch from elastic deformation to ploughing, and then cutting as the grinding depth increases. It was observed that the critical relative grain sharpness (RGS) for the transition from ploughing to cutting is greatly influenced by the grain size. Furthermore, as the grinding depth increases, the dominant subsurface damage mechanism could switch from surface friction into slip motion along the <110> directions. Meanwhile, as the grain size increases, less friction-induced damage is generated in the subsurface workpiece, and more dislocations are formed near the machined groove. Moreover, regardless of the grain size, it was observed that the generation of dislocation is more apparent as the dominant grinding mechanism becomes ploughing and cutting.
AB - Cadmium telluride (CdTe) is known as an important semiconductor material with favorable physical properties. However, as a soft-brittle material, the fabrication of high-quality surfaces on CdTe is quite challenging. To improve the fundamental understanding of the nanoscale deformation mechanisms of CdTe, in this paper, MD simulation was performed to explore the nano-grinding process of CdTe with consideration of the effects of grain size and grinding depth. The simulation results indicate that during nano-grinding, the dominant grinding mechanism could switch from elastic deformation to ploughing, and then cutting as the grinding depth increases. It was observed that the critical relative grain sharpness (RGS) for the transition from ploughing to cutting is greatly influenced by the grain size. Furthermore, as the grinding depth increases, the dominant subsurface damage mechanism could switch from surface friction into slip motion along the <110> directions. Meanwhile, as the grain size increases, less friction-induced damage is generated in the subsurface workpiece, and more dislocations are formed near the machined groove. Moreover, regardless of the grain size, it was observed that the generation of dislocation is more apparent as the dominant grinding mechanism becomes ploughing and cutting.
KW - cadmium telluride
KW - material removal mechanism
KW - molecular dynamics simulation
KW - nano-grinding
KW - subsurface damage
UR - http://www.scopus.com/inward/record.url?scp=85173832301&partnerID=8YFLogxK
U2 - 10.3390/nano13192670
DO - 10.3390/nano13192670
M3 - Journal article
AN - SCOPUS:85173832301
SN - 2079-4991
VL - 13
JO - Nanomaterials
JF - Nanomaterials
IS - 19
M1 - 2670
ER -