Novel periodic microstructures fabricated by multi-exposure two-beam interference lithography

Keyphrases

• Microstructure 100%
• Interference Lithography 100%
• Periodic Microstructure 100%
• Multiple Exposures 100%
• Two-beam Interference 100%
• Nanopatterning 100%
• Periodic Structures 50%
• Numerical Simulation 50%
• Diffraction Spectrum 50%
• Intensity Distribution 50%
• Experiment Results 50%
• Fabrication Technology 50%
• Two-dimensional Quasicrystals 50%
• Quasicrystal Structure 50%
• Experimental Fabrication 50%

Material Science

• Lithography 100%
• Periodic Structure 50%
• Quasicrystal 50%
• Crystal Structure 50%

Engineering

• Lithography 100%
• Two Dimensional 50%
• Square Centimeter 50%
• Crystal Structure 50%