Novel periodic microstructures fabricated by multi-exposure two-beam interference lithography

Yinbing Bai, Aping Zhang

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

We present some novel periodic structures with different internal nanopatterns based on multi-exposure two-beam interference lithography. Two-dimensional quasi-crystal structures are fabricated with precisely control of exposure directions and doses as well as the total number of exposures. Experimental fabrication of microstructures are demonstrated and comparied with numerical simulations of intensity distributions. The size of the fabricated samples is around 1 square centimeter. The diffraction spectra of the fabricated samples are measured and tested. The experiment results show such a fabrication technology is very promising for making diverse large-area microstructures with complex internal nanopatterns.
Original languageEnglish
Title of host publicationOptical Sensors and Biophotonics II
Volume7990
DOIs
Publication statusPublished - 29 Mar 2011
Externally publishedYes
EventOptical Sensors and Biophotonics II - Shanghai, China
Duration: 8 Dec 201012 Dec 2010

Conference

ConferenceOptical Sensors and Biophotonics II
Country/TerritoryChina
CityShanghai
Period8/12/1012/12/10

Keywords

  • Lithography
  • Micro-optical devices
  • Microstructure fabrication
  • Optical design and fabrication

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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