Novel periodic microstructures fabricated by multi-exposure two-beam interference lithography

null Yinbing Bai; Aping Zhang

doi:10.1117/12.888450

Novel periodic microstructures fabricated by multi-exposure two-beam interference lithography

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

We present some novel periodic structures with different internal nanopatterns based on multi-exposure two-beam interference lithography. Two-dimensional quasi-crystal structures are fabricated with precisely control of exposure directions and doses as well as the total number of exposures. Experimental fabrication of microstructures are demonstrated and comparied with numerical simulations of intensity distributions. The size of the fabricated samples is around 1 square centimeter. The diffraction spectra of the fabricated samples are measured and tested. The experiment results show such a fabrication technology is very promising for making diverse large-area microstructures with complex internal nanopatterns.

Original language	English
Title of host publication	Optical Sensors and Biophotonics II
Volume	7990
DOIs	https://doi.org/10.1117/12.888450
Publication status	Published - 29 Mar 2011
Externally published	Yes
Event	Optical Sensors and Biophotonics II - Shanghai, China Duration: 8 Dec 2010 → 12 Dec 2010

Conference

Conference	Optical Sensors and Biophotonics II
Country/Territory	China
City	Shanghai
Period	8/12/10 → 12/12/10

Keywords

Lithography
Micro-optical devices
Microstructure fabrication
Optical design and fabrication

ASJC Scopus subject areas

Applied Mathematics
Computer Science Applications
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Condensed Matter Physics

More information

10.1117/12.888450

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title = "Novel periodic microstructures fabricated by multi-exposure two-beam interference lithography",

abstract = "We present some novel periodic structures with different internal nanopatterns based on multi-exposure two-beam interference lithography. Two-dimensional quasi-crystal structures are fabricated with precisely control of exposure directions and doses as well as the total number of exposures. Experimental fabrication of microstructures are demonstrated and comparied with numerical simulations of intensity distributions. The size of the fabricated samples is around 1 square centimeter. The diffraction spectra of the fabricated samples are measured and tested. The experiment results show such a fabrication technology is very promising for making diverse large-area microstructures with complex internal nanopatterns.",

keywords = "Lithography, Micro-optical devices, Microstructure fabrication, Optical design and fabrication",

author = "{Yinbing Bai} and Aping Zhang",

year = "2011",

month = mar,

day = "29",

doi = "10.1117/12.888450",

language = "English",

isbn = "9780819485588",

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note = "Optical Sensors and Biophotonics II ; Conference date: 08-12-2010 Through 12-12-2010",

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TY - GEN

T1 - Novel periodic microstructures fabricated by multi-exposure two-beam interference lithography

AU - Yinbing Bai, null

AU - Zhang, Aping

PY - 2011/3/29

Y1 - 2011/3/29

N2 - We present some novel periodic structures with different internal nanopatterns based on multi-exposure two-beam interference lithography. Two-dimensional quasi-crystal structures are fabricated with precisely control of exposure directions and doses as well as the total number of exposures. Experimental fabrication of microstructures are demonstrated and comparied with numerical simulations of intensity distributions. The size of the fabricated samples is around 1 square centimeter. The diffraction spectra of the fabricated samples are measured and tested. The experiment results show such a fabrication technology is very promising for making diverse large-area microstructures with complex internal nanopatterns.

AB - We present some novel periodic structures with different internal nanopatterns based on multi-exposure two-beam interference lithography. Two-dimensional quasi-crystal structures are fabricated with precisely control of exposure directions and doses as well as the total number of exposures. Experimental fabrication of microstructures are demonstrated and comparied with numerical simulations of intensity distributions. The size of the fabricated samples is around 1 square centimeter. The diffraction spectra of the fabricated samples are measured and tested. The experiment results show such a fabrication technology is very promising for making diverse large-area microstructures with complex internal nanopatterns.

KW - Lithography

KW - Micro-optical devices

KW - Microstructure fabrication

KW - Optical design and fabrication

UR - http://www.scopus.com/inward/record.url?scp=79953006606&partnerID=8YFLogxK

U2 - 10.1117/12.888450

DO - 10.1117/12.888450

M3 - Conference article published in proceeding or book

SN - 9780819485588

VL - 7990

BT - Optical Sensors and Biophotonics II

T2 - Optical Sensors and Biophotonics II

Y2 - 8 December 2010 through 12 December 2010

ER -

Novel periodic microstructures fabricated by multi-exposure two-beam interference lithography

Abstract

Conference

Keywords

ASJC Scopus subject areas

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