Novel monolithic integration of RF-MEMS switch with CMOS-IC on organic substrate for compact RF system

Q. X. Zhang; A. B. Yu; R. Yang; H. Y. Li; L. H. Guo; E. B. Liao; M. Tang; R. Kumar; A. Q. Liu; G. Q. Lo; N. Balasubramanian; D. L. Kwong

doi:10.1109/IEDM.2006.346890

Novel monolithic integration of RF-MEMS switch with CMOS-IC on organic substrate for compact RF system

Q. X. Zhang, A. B. Yu, R. Yang, H. Y. Li, L. H. Guo, E. B. Liao, M. Tang, R. Kumar, A. Q. Liu, G. Q. Lo, N. Balasubramanian, D. L. Kwong

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

14 Citations (Scopus)

Abstract

A novel monolithic integration of RF MEMS switch and CMOS IC on organic substrate was demonstrated. RF MEMS switch was firstly fabricated on CMOS IC wafer, and the stacked structure was subsequently transferred onto an organic substrate (i.e., FR-4). The RF-MEMS switch illustrates significantly improved performance, while integrated together, the CMOS show preserved functionality. This technology demonstrates the feasibility and potential applicability of building high performance, compact RF system for wireless communication.

Original language	English
Title of host publication	2006 International Electron Devices Meeting Technical Digest, IEDM
DOIs	https://doi.org/10.1109/IEDM.2006.346890
Publication status	Published - Dec 2006
Externally published	Yes
Event	2006 International Electron Devices Meeting, IEDM - San Francisco, CA, United States Duration: 10 Dec 2006 → 13 Dec 2006

Publication series

Name	Technical Digest - International Electron Devices Meeting, IEDM
ISSN (Print)	0163-1918

Conference

Conference	2006 International Electron Devices Meeting, IEDM
Country/Territory	United States
City	San Francisco, CA
Period	10/12/06 → 13/12/06

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

More information

10.1109/IEDM.2006.346890

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Zhang, Q. X., Yu, A. B., Yang, R., Li, H. Y., Guo, L. H., Liao, E. B., Tang, M., Kumar, R., Liu, A. Q., Lo, G. Q., Balasubramanian, N., & Kwong, D. L. (2006). Novel monolithic integration of RF-MEMS switch with CMOS-IC on organic substrate for compact RF system. In 2006 International Electron Devices Meeting Technical Digest, IEDM Article 4154309 (Technical Digest - International Electron Devices Meeting, IEDM). https://doi.org/10.1109/IEDM.2006.346890

@inproceedings{307317b715884a46ac5ffb00e4ea5714,

title = "Novel monolithic integration of RF-MEMS switch with CMOS-IC on organic substrate for compact RF system",

abstract = "A novel monolithic integration of RF MEMS switch and CMOS IC on organic substrate was demonstrated. RF MEMS switch was firstly fabricated on CMOS IC wafer, and the stacked structure was subsequently transferred onto an organic substrate (i.e., FR-4). The RF-MEMS switch illustrates significantly improved performance, while integrated together, the CMOS show preserved functionality. This technology demonstrates the feasibility and potential applicability of building high performance, compact RF system for wireless communication.",

author = "Zhang, {Q. X.} and Yu, {A. B.} and R. Yang and Li, {H. Y.} and Guo, {L. H.} and Liao, {E. B.} and M. Tang and R. Kumar and Liu, {A. Q.} and Lo, {G. Q.} and N. Balasubramanian and Kwong, {D. L.}",

year = "2006",

month = dec,

doi = "10.1109/IEDM.2006.346890",

language = "English",

isbn = "1424404398",

series = "Technical Digest - International Electron Devices Meeting, IEDM",

booktitle = "2006 International Electron Devices Meeting Technical Digest, IEDM",

note = "2006 International Electron Devices Meeting, IEDM ; Conference date: 10-12-2006 Through 13-12-2006",

}

Zhang, QX, Yu, AB, Yang, R, Li, HY, Guo, LH, Liao, EB, Tang, M, Kumar, R, Liu, AQ, Lo, GQ, Balasubramanian, N & Kwong, DL 2006, Novel monolithic integration of RF-MEMS switch with CMOS-IC on organic substrate for compact RF system. in 2006 International Electron Devices Meeting Technical Digest, IEDM., 4154309, Technical Digest - International Electron Devices Meeting, IEDM, 2006 International Electron Devices Meeting, IEDM, San Francisco, CA, United States, 10/12/06. https://doi.org/10.1109/IEDM.2006.346890

Novel monolithic integration of RF-MEMS switch with CMOS-IC on organic substrate for compact RF system. / Zhang, Q. X.; Yu, A. B.; Yang, R. et al.
2006 International Electron Devices Meeting Technical Digest, IEDM. 2006. 4154309 (Technical Digest - International Electron Devices Meeting, IEDM).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AU - Zhang, Q. X.

AU - Yu, A. B.

AU - Yang, R.

AU - Li, H. Y.

AU - Guo, L. H.

AU - Liao, E. B.

AU - Tang, M.

AU - Kumar, R.

AU - Liu, A. Q.

AU - Lo, G. Q.

AU - Balasubramanian, N.

AU - Kwong, D. L.

PY - 2006/12

Y1 - 2006/12

N2 - A novel monolithic integration of RF MEMS switch and CMOS IC on organic substrate was demonstrated. RF MEMS switch was firstly fabricated on CMOS IC wafer, and the stacked structure was subsequently transferred onto an organic substrate (i.e., FR-4). The RF-MEMS switch illustrates significantly improved performance, while integrated together, the CMOS show preserved functionality. This technology demonstrates the feasibility and potential applicability of building high performance, compact RF system for wireless communication.

AB - A novel monolithic integration of RF MEMS switch and CMOS IC on organic substrate was demonstrated. RF MEMS switch was firstly fabricated on CMOS IC wafer, and the stacked structure was subsequently transferred onto an organic substrate (i.e., FR-4). The RF-MEMS switch illustrates significantly improved performance, while integrated together, the CMOS show preserved functionality. This technology demonstrates the feasibility and potential applicability of building high performance, compact RF system for wireless communication.

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DO - 10.1109/IEDM.2006.346890

M3 - Conference article published in proceeding or book

AN - SCOPUS:46049088171

SN - 1424404398

SN - 9781424404391

T3 - Technical Digest - International Electron Devices Meeting, IEDM

BT - 2006 International Electron Devices Meeting Technical Digest, IEDM

T2 - 2006 International Electron Devices Meeting, IEDM

Y2 - 10 December 2006 through 13 December 2006

ER -

Novel monolithic integration of RF-MEMS switch with CMOS-IC on organic substrate for compact RF system

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