@inproceedings{234723969baa4050aec92df5a3f2db82,
title = "Novel design of polysilicon microphone with corrugated diaphragm",
abstract = "This paper presents a novel design of poly-silicon corrugated diaphragm which can be used for micro-machined microphone. The microphone is built on a corrugated polysilicon diaphragm with eight-leg supports. In order to reduce the residual stress, the diaphragm is designed with a corrugated ring. A theoretical calculation is presented to show the result of the new design; the FEM simulation results have shown that the eight-leg support diaphragm is the best compared to other two types. The eight-leg-support diaphragm has more deformation than the all-edge-support diaphragm. The fabrication process is also presented in order to confirm that the new design is possibly built by the new technology.",
author = "Dan Zhang and Qi Shi and Ye Tao",
year = "2010",
doi = "10.1115/IMECE2009-10155",
language = "English",
isbn = "9780791843857",
series = "ASME International Mechanical Engineering Congress and Exposition, Proceedings",
publisher = "American Society of Mechanical Engineers(ASME)",
number = "PART A",
pages = "179--185",
booktitle = "Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009",
address = "United States",
edition = "PART A",
note = "ASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009 ; Conference date: 13-11-2009 Through 19-11-2009",
}