Novel design of a totally decoupled flexure-based XYZ parallel micropositioning stage

Qingsong Xu; Yangmin Li

doi:10.1109/AIM.2010.5695732

Novel design of a totally decoupled flexure-based XYZ parallel micropositioning stage

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

6 Citations (Scopus)

Abstract

This paper presents the design process of a totally decoupled flexure-based XYZ compliant parallel-kinematics micropositioning stage. The uniqueness of the proposed XYZ stage lies in that it consists of three monolithic limbs and has both input and output decoupling properties. The output decoupling is allowed by the employment of a proposed 2-D compound parallelogram flexure, and the input decoupling is implemented by actuation isolation which is enabled by the double compound parallelogram flexures with large transverse stiffness. By modeling each flexure hinge as a 2-DOF compliant joint, analytical models for the amplification ratio and input stiffness of the XYZ stage are established, which are validated by finite element analysis performed with ANSYS. The presented results are useful for the development of a new XYZ micropositioning stage for the micro-/nanomanipulation applications.

Original language	English
Title of host publication	2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2010
Pages	866-871
Number of pages	6
DOIs	https://doi.org/10.1109/AIM.2010.5695732
Publication status	Published - 1 Dec 2010
Externally published	Yes
Event	2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2010 - Montreal, QC, Canada Duration: 6 Jul 2010 → 9 Jul 2010

Conference

Conference	2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2010
Country/Territory	Canada
City	Montreal, QC
Period	6/07/10 → 9/07/10

ASJC Scopus subject areas

Electrical and Electronic Engineering
Control and Systems Engineering
Computer Science Applications
Software

More information

10.1109/AIM.2010.5695732

Cite this

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abstract = "This paper presents the design process of a totally decoupled flexure-based XYZ compliant parallel-kinematics micropositioning stage. The uniqueness of the proposed XYZ stage lies in that it consists of three monolithic limbs and has both input and output decoupling properties. The output decoupling is allowed by the employment of a proposed 2-D compound parallelogram flexure, and the input decoupling is implemented by actuation isolation which is enabled by the double compound parallelogram flexures with large transverse stiffness. By modeling each flexure hinge as a 2-DOF compliant joint, analytical models for the amplification ratio and input stiffness of the XYZ stage are established, which are validated by finite element analysis performed with ANSYS. The presented results are useful for the development of a new XYZ micropositioning stage for the micro-/nanomanipulation applications.",

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Xu, Q & Li, Y 2010, Novel design of a totally decoupled flexure-based XYZ parallel micropositioning stage. in 2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2010., 5695732, pp. 866-871, 2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2010, Montreal, QC, Canada, 6/07/10. https://doi.org/10.1109/AIM.2010.5695732

Novel design of a totally decoupled flexure-based XYZ parallel micropositioning stage. / Xu, Qingsong; Li, Yangmin.
2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2010. 2010. p. 866-871 5695732.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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Novel design of a totally decoupled flexure-based XYZ parallel micropositioning stage

Abstract

Conference

ASJC Scopus subject areas

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