Novel design of a three DOFs MEMS-based precision manipulator

Min Pan; Dan Zhang; Zhongzhe Chi

doi:10.1109/ICMA.2011.5985635

Novel design of a three DOFs MEMS-based precision manipulator

Min Pan, Dan Zhang, Zhongzhe Chi

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

1 Citation (Scopus)

Abstract

This paper presents a novel design of three degrees of freedom (DOFs) MEMS-based precision manipulator. The purpose of the manipulator is to position a microscope tool on the work plate doing small movement tasks. A parallel kinematic mechanism with three legs is used to convert the motion of longitudinal comb-drives into three direction translations at the end-effector. Each leg has three joints (a prismatic joint and two universal joints) which consists the basic structure of the design. The manipulator design has a high actuation flexibility combined with a relatively high stiffness due to its structure and materials. A theoretical calculation is revealed to show inverse kinematics. The fabrication of the manipulator is also presented in order to demonstrate the possibility of producing the manipulator.

Original language	English
Title of host publication	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
Pages	80-85
Number of pages	6
DOIs	https://doi.org/10.1109/ICMA.2011.5985635
Publication status	Published - 2011
Externally published	Yes
Event	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011 - Beijing, China Duration: 7 Aug 2011 → 10 Aug 2011

Publication series

Name	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011

Conference

Conference	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
Country/Territory	China
City	Beijing
Period	7/08/11 → 10/08/11

ASJC Scopus subject areas

Artificial Intelligence
Electrical and Electronic Engineering
Mechanical Engineering

More information

10.1109/ICMA.2011.5985635

Cite this

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title = "Novel design of a three DOFs MEMS-based precision manipulator",

abstract = "This paper presents a novel design of three degrees of freedom (DOFs) MEMS-based precision manipulator. The purpose of the manipulator is to position a microscope tool on the work plate doing small movement tasks. A parallel kinematic mechanism with three legs is used to convert the motion of longitudinal comb-drives into three direction translations at the end-effector. Each leg has three joints (a prismatic joint and two universal joints) which consists the basic structure of the design. The manipulator design has a high actuation flexibility combined with a relatively high stiffness due to its structure and materials. A theoretical calculation is revealed to show inverse kinematics. The fabrication of the manipulator is also presented in order to demonstrate the possibility of producing the manipulator.",

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language = "English",

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Pan, M, Zhang, D & Chi, Z 2011, Novel design of a three DOFs MEMS-based precision manipulator. in 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011., 5985635, 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011, pp. 80-85, 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011, Beijing, China, 7/08/11. https://doi.org/10.1109/ICMA.2011.5985635

Novel design of a three DOFs MEMS-based precision manipulator. / Pan, Min; Zhang, Dan; Chi, Zhongzhe.
2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011. 2011. p. 80-85 5985635 (2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AB - This paper presents a novel design of three degrees of freedom (DOFs) MEMS-based precision manipulator. The purpose of the manipulator is to position a microscope tool on the work plate doing small movement tasks. A parallel kinematic mechanism with three legs is used to convert the motion of longitudinal comb-drives into three direction translations at the end-effector. Each leg has three joints (a prismatic joint and two universal joints) which consists the basic structure of the design. The manipulator design has a high actuation flexibility combined with a relatively high stiffness due to its structure and materials. A theoretical calculation is revealed to show inverse kinematics. The fabrication of the manipulator is also presented in order to demonstrate the possibility of producing the manipulator.

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Novel design of a three DOFs MEMS-based precision manipulator

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