TY - GEN
T1 - None-touched near-field optical nanolithography
AU - Chen, S. C.
AU - Chang, T. M.
AU - Chiu, K. P.
AU - Tsai, D. P.
PY - 2006/9
Y1 - 2006/9
N2 - Silver nanorods have an excellent effect on the transmitted wave localizing, especially, the intensity of the transmitted wave is strong enough below the bottom of the nanorods. Based on this property, we offer a non-touched optical nanolithographic imaging method, and the structure of the mask is made by silver nanorods which are embedded in a silica block. We numerically prove the availability of the nanolithography in visible domain, and a high resolution of nanolithographic image can be built by a multi-exposures process.
AB - Silver nanorods have an excellent effect on the transmitted wave localizing, especially, the intensity of the transmitted wave is strong enough below the bottom of the nanorods. Based on this property, we offer a non-touched optical nanolithographic imaging method, and the structure of the mask is made by silver nanorods which are embedded in a silica block. We numerically prove the availability of the nanolithography in visible domain, and a high resolution of nanolithographic image can be built by a multi-exposures process.
UR - http://www.scopus.com/inward/record.url?scp=42649113402&partnerID=8YFLogxK
U2 - 10.1109/NUSOD.2006.306752
DO - 10.1109/NUSOD.2006.306752
M3 - Conference article published in proceeding or book
AN - SCOPUS:42649113402
SN - 078039755X
SN - 9780780397552
T3 - 2006 International Conference on Numerical Simulation of Semiconductor Optoelectronic Devices, NUSOD '06
SP - 83
EP - 84
BT - 2006 International Conference on Numerical Simulation of Semiconductor Optoelectronic Devices, NUSOD '06
T2 - 2006 International Conference on Numerical Simulation of Semiconductor Optoelectronic Devices, NUSOD '06
Y2 - 11 September 2006 through 14 September 2006
ER -