New fabrication of high-frequency (100-MHz) ultrasound PZT film kerfless linear array [Correspondence]

Benpeng Zhu; Ngai Chan; Jiyan Dai; K. Shung; Shinichi Takeuchi; Qifa Zhou

doi:10.1109/TUFFC.2013.2635

New fabrication of high-frequency (100-MHz) ultrasound PZT film kerfless linear array [Correspondence]

Benpeng Zhu, Ngai Chan, Jiyan Dai, K. Shung, Shinichi Takeuchi, Qifa Zhou

Research output: Journal article publication › Journal article › Academic research › peer-review

27 Citations (Scopus)

Abstract

The paper describes the design, fabrication, and measurements of a high-frequency ultrasound kerfless linear array prepared from hydrothermal lead zirconate titanate (PZT) thick film. The 15-¿m hydrothermal PZT thick film with an area of 1 × 1 cm, obtained through a self-separation process from Ti substrate, was used to fabricate a 32-element 100-MHz kerfless linear array with photolithography. The bandwidth at ¿6 dB without matching layer, insertion loss around center frequency, and crosstalk between adjacent elements were measured to be 39%, ¿30 dB, and ¿15 dB, respectively.

Original language	English
Article number	6489821
Pages (from-to)	854-857
Number of pages	4
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	60
Issue number	4
DOIs	https://doi.org/10.1109/TUFFC.2013.2635
Publication status	Published - 10 Apr 2013

ASJC Scopus subject areas

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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10.1109/TUFFC.2013.2635

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abstract = "The paper describes the design, fabrication, and measurements of a high-frequency ultrasound kerfless linear array prepared from hydrothermal lead zirconate titanate (PZT) thick film. The 15-¿m hydrothermal PZT thick film with an area of 1 × 1 cm, obtained through a self-separation process from Ti substrate, was used to fabricate a 32-element 100-MHz kerfless linear array with photolithography. The bandwidth at ¿6 dB without matching layer, insertion loss around center frequency, and crosstalk between adjacent elements were measured to be 39%, ¿30 dB, and ¿15 dB, respectively.",

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New fabrication of high-frequency (100-MHz) ultrasound PZT film kerfless linear array [Correspondence]. / Zhu, Benpeng; Chan, Ngai; Dai, Jiyan et al.
In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 60, No. 4, 6489821, 10.04.2013, p. 854-857.

Research output: Journal article publication › Journal article › Academic research › peer-review

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AU - Takeuchi, Shinichi

AU - Zhou, Qifa

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New fabrication of high-frequency (100-MHz) ultrasound PZT film kerfless linear array [Correspondence]

Abstract

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