New fabrication of high-frequency (100-MHz) ultrasound PZT film kerfless linear array [Correspondence]

Benpeng Zhu, Ngai Chan, Jiyan Dai, K. Shung, Shinichi Takeuchi, Qifa Zhou

Research output: Journal article publicationJournal articleAcademic researchpeer-review

27 Citations (Scopus)


The paper describes the design, fabrication, and measurements of a high-frequency ultrasound kerfless linear array prepared from hydrothermal lead zirconate titanate (PZT) thick film. The 15-¿m hydrothermal PZT thick film with an area of 1 × 1 cm, obtained through a self-separation process from Ti substrate, was used to fabricate a 32-element 100-MHz kerfless linear array with photolithography. The bandwidth at ¿6 dB without matching layer, insertion loss around center frequency, and crosstalk between adjacent elements were measured to be 39%, ¿30 dB, and ¿15 dB, respectively.
Original languageEnglish
Article number6489821
Pages (from-to)854-857
Number of pages4
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Issue number4
Publication statusPublished - 10 Apr 2013

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

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