NEMS variable optical attenuator (VOA) driven by optical force

B. Dong; H. Cai; Y. D. Gu; Z. C. Yang; Y. F. Jin; Y. L. Hao; D. L. Kwong; A. Q. Liu

doi:10.1109/MEMSYS.2015.7051123

NEMS variable optical attenuator (VOA) driven by optical force

B. Dong, H. Cai, Y. D. Gu, Z. C. Yang, Y. F. Jin, Y. L. Hao, D. L. Kwong, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

5 Citations (Scopus)

Abstract

This paper reports a Nanoelectromechanical System (NEMS) Variable Optical Attenuator (VOA) driven by the optical gradient force. The VOA is realized via a waveguide based directional coupler. The gap in the directional coupler is controlled via an optical force driven actuator. The doubly-clamped silicon beam actuator is controlled by tuning the wavelength of control light. The signal light can be attenuated to 20% of original value in the experiment. The NEMS VOAs have the merits of small dimension, low power consumption and good capability for all optical integration, making it a good candidate for future applications in silicon photonics circuit and optical communication devices.

Original language	English
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	972-975
Number of pages	4
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7051123
Publication status	Published - 26 Feb 2015
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 18 Jan 2015 → 22 Jan 2015

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Conference

Conference	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	18/01/15 → 22/01/15

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

More information

10.1109/MEMSYS.2015.7051123

Cite this

Dong, B., Cai, H., Gu, Y. D., Yang, Z. C., Jin, Y. F., Hao, Y. L., Kwong, D. L., & Liu, A. Q. (2015). NEMS variable optical attenuator (VOA) driven by optical force. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 972-975). Article 7051123 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7051123

Dong, B. ; Cai, H. ; Gu, Y. D. et al. / NEMS variable optical attenuator (VOA) driven by optical force. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 972-975 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

@inproceedings{5a0ed7780d4741b2a29f4becee1310a7,

title = "NEMS variable optical attenuator (VOA) driven by optical force",

abstract = "This paper reports a Nanoelectromechanical System (NEMS) Variable Optical Attenuator (VOA) driven by the optical gradient force. The VOA is realized via a waveguide based directional coupler. The gap in the directional coupler is controlled via an optical force driven actuator. The doubly-clamped silicon beam actuator is controlled by tuning the wavelength of control light. The signal light can be attenuated to 20% of original value in the experiment. The NEMS VOAs have the merits of small dimension, low power consumption and good capability for all optical integration, making it a good candidate for future applications in silicon photonics circuit and optical communication devices.",

author = "B. Dong and H. Cai and Gu, {Y. D.} and Yang, {Z. C.} and Jin, {Y. F.} and Hao, {Y. L.} and Kwong, {D. L.} and Liu, {A. Q.}",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 ; Conference date: 18-01-2015 Through 22-01-2015",

year = "2015",

month = feb,

day = "26",

doi = "10.1109/MEMSYS.2015.7051123",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "February",

pages = "972--975",

booktitle = "2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015",

edition = "February",

}

Dong, B, Cai, H, Gu, YD, Yang, ZC, Jin, YF, Hao, YL, Kwong, DL & Liu, AQ 2015, NEMS variable optical attenuator (VOA) driven by optical force. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7051123, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 972-975, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 18/01/15. https://doi.org/10.1109/MEMSYS.2015.7051123

NEMS variable optical attenuator (VOA) driven by optical force. / Dong, B.; Cai, H.; Gu, Y. D. et al.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 972-975 7051123 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - NEMS variable optical attenuator (VOA) driven by optical force

AU - Dong, B.

AU - Cai, H.

AU - Gu, Y. D.

AU - Yang, Z. C.

AU - Jin, Y. F.

AU - Hao, Y. L.

AU - Kwong, D. L.

AU - Liu, A. Q.

PY - 2015/2/26

Y1 - 2015/2/26

N2 - This paper reports a Nanoelectromechanical System (NEMS) Variable Optical Attenuator (VOA) driven by the optical gradient force. The VOA is realized via a waveguide based directional coupler. The gap in the directional coupler is controlled via an optical force driven actuator. The doubly-clamped silicon beam actuator is controlled by tuning the wavelength of control light. The signal light can be attenuated to 20% of original value in the experiment. The NEMS VOAs have the merits of small dimension, low power consumption and good capability for all optical integration, making it a good candidate for future applications in silicon photonics circuit and optical communication devices.

AB - This paper reports a Nanoelectromechanical System (NEMS) Variable Optical Attenuator (VOA) driven by the optical gradient force. The VOA is realized via a waveguide based directional coupler. The gap in the directional coupler is controlled via an optical force driven actuator. The doubly-clamped silicon beam actuator is controlled by tuning the wavelength of control light. The signal light can be attenuated to 20% of original value in the experiment. The NEMS VOAs have the merits of small dimension, low power consumption and good capability for all optical integration, making it a good candidate for future applications in silicon photonics circuit and optical communication devices.

UR - http://www.scopus.com/inward/record.url?scp=84931088706&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2015.7051123

DO - 10.1109/MEMSYS.2015.7051123

M3 - Conference article published in proceeding or book

AN - SCOPUS:84931088706

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 972

EP - 975

BT - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015

Y2 - 18 January 2015 through 22 January 2015

ER -

Dong B, Cai H, Gu YD, Yang ZC, Jin YF, Hao YL et al. NEMS variable optical attenuator (VOA) driven by optical force. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 972-975. 7051123. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7051123

NEMS variable optical attenuator (VOA) driven by optical force

Abstract

Publication series

Conference

ASJC Scopus subject areas

More information

Other files and links

Fingerprint

Cite this