NEMS spectrometer-on-a-chip

B. Dong, H. Cai, M. Tang, Y. D. Gu, Z. C. Yang, Y. F. Jin, Y. L. Hao, D. L. Kwong, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

This paper reports a NEMS spectrometer-on-a-chip, which integrates fiber-waveguide coupler and photo detector on a single silicon chip. Spectrometer based on Fourier transform, for the first time, has been miniaturized into a waveguide based silicon photonic chip. The on-chip spectrometer is fabricated by nano-silicon-photonic fabrication processes. It also eliminates moving parts and confine light in nano-waveguides, which can effectively reduce the spectrometer chip size (1 cm × 1 cm) and lower the power consumption (< 10 mW), while maintaining high resolution (< 40 cm-1). It has high potential applications in biomedical and physical spectroscopy field.

Original languageEnglish
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2093-2096
Number of pages4
ISBN (Electronic)9781479989553
DOIs
Publication statusPublished - 5 Aug 2015
Externally publishedYes
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: 21 Jun 201525 Jun 2015

Publication series

Name2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/TerritoryUnited States
CityAnchorage
Period21/06/1525/06/15

Keywords

  • FTIR
  • NEMS
  • on-chip spectrometer

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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