@inproceedings{d3d6e70f925d45e9b03dfff434c0c3f0,
title = "NEMS spectrometer-on-a-chip",
abstract = "This paper reports a NEMS spectrometer-on-a-chip, which integrates fiber-waveguide coupler and photo detector on a single silicon chip. Spectrometer based on Fourier transform, for the first time, has been miniaturized into a waveguide based silicon photonic chip. The on-chip spectrometer is fabricated by nano-silicon-photonic fabrication processes. It also eliminates moving parts and confine light in nano-waveguides, which can effectively reduce the spectrometer chip size (1 cm × 1 cm) and lower the power consumption (< 10 mW), while maintaining high resolution (< 40 cm-1). It has high potential applications in biomedical and physical spectroscopy field.",
keywords = "FTIR, NEMS, on-chip spectrometer",
author = "B. Dong and H. Cai and M. Tang and Gu, \{Y. D.\} and Yang, \{Z. C.\} and Jin, \{Y. F.\} and Hao, \{Y. L.\} and Kwong, \{D. L.\} and Liu, \{A. Q.\}",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
year = "2015",
month = aug,
day = "5",
doi = "10.1109/TRANSDUCERS.2015.7181370",
language = "English",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "2093--2096",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
}