NEMS optical cross connect (OXC) driven by opticl force

H. Cai; J. X. Lin; J. H. Wu; B. Dong; Y. D. Gu; Z. C. Yang; Y. F. Jin; Y. L. Hao; D. L. Kwong; A. Q. Liu

doi:10.1109/MEMSYS.2015.7050885

NEMS optical cross connect (OXC) driven by opticl force

H. Cai, J. X. Lin, J. H. Wu, B. Dong, Y. D. Gu, Z. C. Yang, Y. F. Jin, Y. L. Hao, D. L. Kwong, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

3 Citations (Scopus)

Abstract

This paper presents a compact silicon-photonic based optical cross connect (OXC) driven by the optical gradient force. Each switch element consists of a waveguide-crossing-coupled micro-ring resonator and a suspended arc. The device is fabricated with a standard CMOS compatible process using deep-UV 248-nm lithography with a double-etch technique. A switching time of 0.24 μs is experimentally demonstrated. The proposed switch topology of the interconnections has potentials of employing a single wavelength channel or multiple wavelength channels, and provides channel selection from sets of input fibers and sets of output fibers.

Original language	English
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	57-60
Number of pages	4
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7050885
Publication status	Published - 26 Feb 2015
Externally published	Yes
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 18 Jan 2015 → 22 Jan 2015

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Conference

Conference	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	18/01/15 → 22/01/15

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

More information

10.1109/MEMSYS.2015.7050885

Cite this

Cai, H., Lin, J. X., Wu, J. H., Dong, B., Gu, Y. D., Yang, Z. C., Jin, Y. F., Hao, Y. L., Kwong, D. L., & Liu, A. Q. (2015). NEMS optical cross connect (OXC) driven by opticl force. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 57-60). Article 7050885 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7050885

Cai, H. ; Lin, J. X. ; Wu, J. H. et al. / NEMS optical cross connect (OXC) driven by opticl force. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 57-60 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

@inproceedings{6a0066382d3044328960db66f210a590,

title = "NEMS optical cross connect (OXC) driven by opticl force",

abstract = "This paper presents a compact silicon-photonic based optical cross connect (OXC) driven by the optical gradient force. Each switch element consists of a waveguide-crossing-coupled micro-ring resonator and a suspended arc. The device is fabricated with a standard CMOS compatible process using deep-UV 248-nm lithography with a double-etch technique. A switching time of 0.24 μs is experimentally demonstrated. The proposed switch topology of the interconnections has potentials of employing a single wavelength channel or multiple wavelength channels, and provides channel selection from sets of input fibers and sets of output fibers.",

author = "H. Cai and Lin, {J. X.} and Wu, {J. H.} and B. Dong and Gu, {Y. D.} and Yang, {Z. C.} and Jin, {Y. F.} and Hao, {Y. L.} and Kwong, {D. L.} and Liu, {A. Q.}",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 ; Conference date: 18-01-2015 Through 22-01-2015",

year = "2015",

month = feb,

day = "26",

doi = "10.1109/MEMSYS.2015.7050885",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "February",

pages = "57--60",

booktitle = "2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015",

edition = "February",

}

Cai, H, Lin, JX, Wu, JH, Dong, B, Gu, YD, Yang, ZC, Jin, YF, Hao, YL, Kwong, DL & Liu, AQ 2015, NEMS optical cross connect (OXC) driven by opticl force. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7050885, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 57-60, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 18/01/15. https://doi.org/10.1109/MEMSYS.2015.7050885

NEMS optical cross connect (OXC) driven by opticl force. / Cai, H.; Lin, J. X.; Wu, J. H. et al.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 57-60 7050885 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - NEMS optical cross connect (OXC) driven by opticl force

AU - Cai, H.

AU - Lin, J. X.

AU - Wu, J. H.

AU - Dong, B.

AU - Gu, Y. D.

AU - Yang, Z. C.

AU - Jin, Y. F.

AU - Hao, Y. L.

AU - Kwong, D. L.

AU - Liu, A. Q.

PY - 2015/2/26

Y1 - 2015/2/26

N2 - This paper presents a compact silicon-photonic based optical cross connect (OXC) driven by the optical gradient force. Each switch element consists of a waveguide-crossing-coupled micro-ring resonator and a suspended arc. The device is fabricated with a standard CMOS compatible process using deep-UV 248-nm lithography with a double-etch technique. A switching time of 0.24 μs is experimentally demonstrated. The proposed switch topology of the interconnections has potentials of employing a single wavelength channel or multiple wavelength channels, and provides channel selection from sets of input fibers and sets of output fibers.

AB - This paper presents a compact silicon-photonic based optical cross connect (OXC) driven by the optical gradient force. Each switch element consists of a waveguide-crossing-coupled micro-ring resonator and a suspended arc. The device is fabricated with a standard CMOS compatible process using deep-UV 248-nm lithography with a double-etch technique. A switching time of 0.24 μs is experimentally demonstrated. The proposed switch topology of the interconnections has potentials of employing a single wavelength channel or multiple wavelength channels, and provides channel selection from sets of input fibers and sets of output fibers.

UR - http://www.scopus.com/inward/record.url?scp=84931026502&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2015.7050885

DO - 10.1109/MEMSYS.2015.7050885

M3 - Conference article published in proceeding or book

AN - SCOPUS:84931026502

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 57

EP - 60

BT - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015

Y2 - 18 January 2015 through 22 January 2015

ER -

Cai H, Lin JX, Wu JH, Dong B, Gu YD, Yang ZC et al. NEMS optical cross connect (OXC) driven by opticl force. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 57-60. 7050885. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7050885

NEMS optical cross connect (OXC) driven by opticl force

Abstract

Publication series

Conference

ASJC Scopus subject areas

More information

Other files and links

Fingerprint

Cite this