@inproceedings{61daa2fab2cb4c9895ca237d2f174d14,
title = "NEMS integrated photonic system using nano-silicon-photonic circuits",
abstract = "This paper reports a NEMS integrated photonic system, which integrate tunable laser, optical cross correct and variable optical attenuators. The NEMS integrated photonic system is fabricated with nano-silicon-photonic fabrication technology to integrate various functions in a single silicon photonic circuit chip. The high light-confinement capability of the nano-silicon waveguides guarantees superior performance. The proposed NEMS integrated photonic system demonstrates large tuning range (45 nm), pure single-mode properties (45 dB side-mode-suppression ratio (SMSR)).",
keywords = "NEMS, optical cross connect, photonic circuits, tunable laser, VOA",
author = "B. Dong and H. Cai and M. Tang and Gu, \{Y. D.\} and Yang, \{Z. C.\} and Jin, \{Y. F.\} and Hao, \{Y. L.\} and Kwong, \{D. L.\} and Liu, \{A. Q.\}",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
year = "2015",
month = aug,
day = "5",
doi = "10.1109/TRANSDUCERS.2015.7181093",
language = "English",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "997--1000",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
}