NEMS integrated photonic system using nano-silicon-photonic circuits

B. Dong, H. Cai, M. Tang, Y. D. Gu, Z. C. Yang, Y. F. Jin, Y. L. Hao, D. L. Kwong, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

1 Citation (Scopus)

Abstract

This paper reports a NEMS integrated photonic system, which integrate tunable laser, optical cross correct and variable optical attenuators. The NEMS integrated photonic system is fabricated with nano-silicon-photonic fabrication technology to integrate various functions in a single silicon photonic circuit chip. The high light-confinement capability of the nano-silicon waveguides guarantees superior performance. The proposed NEMS integrated photonic system demonstrates large tuning range (45 nm), pure single-mode properties (45 dB side-mode-suppression ratio (SMSR)).

Original languageEnglish
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages997-1000
Number of pages4
ISBN (Electronic)9781479989553
DOIs
Publication statusPublished - 5 Aug 2015
Externally publishedYes
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: 21 Jun 201525 Jun 2015

Publication series

Name2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/TerritoryUnited States
CityAnchorage
Period21/06/1525/06/15

Keywords

  • NEMS
  • optical cross connect
  • photonic circuits
  • tunable laser
  • VOA

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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