@inproceedings{ccca37c994a24da8930604012f94e003,
title = "NEMS actuator driven by electrostatic and optical force with nano-scale resolution",
abstract = "We experimentally demonstrate a silicon nano-wire actuator with a nano-scale resolution and tunable actuation range. The nano-scale resolution is obtained through implementing different control regulations, including coarse tuning by the electrostatic force and precision tuning by the optical force. More specially, the optical force enabled silicon nano-wire actuator can break the classical NEMS 1/3 actuation range limit, extending the actuation range to an arbitrary limit in principle. This unique approach not only provides a simple, non-intrusive solution to the tunable air gap of NEMS devices, but also presents an ultra-sensitive optical read out of the mechanical motion.",
keywords = "Actuator, NEMS, Optical force",
author = "Huang, {J. G.} and B. Dong and M. Tang and Gu, {Y. D.} and Wu, {J. H.} and Chen, {T. N.} and Yang, {Z. C.} and Jin, {Y. F.} and Hao, {Y. L.} and Kwong, {D. L.} and Liu, {A. Q.}",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
year = "2015",
month = aug,
day = "5",
doi = "10.1109/TRANSDUCERS.2015.7181374",
language = "English",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "2109--2112",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
}