Nanotribological and nanomechanical properties of 5-80 nm tetrahedral amorphous carbon films on silicon

Keyphrases

• Tetrahedral Amorphous Carbon Film 100%
• Nanomaterial Properties 100%
• Nanomechanical Properties 100%
• Load Support 100%
• Delamination 50%
• Composite Film 50%
• Transcranial Alternating Current Stimulation (tACS) 50%
• Filtered Cathodic Vacuum Arc 50%
• Film Thickness 50%
• Nanoindentation 50%
• Phase Transformation 50%
• Indentation 50%
• Low Stress 50%
• Thick Film 50%
• Silicon Substrate 50%
• Induced Phase 50%
• Nanoscratch Test 50%
• Nanoscratch 50%
• Microscopic Analysis 50%
• Amorphous Carbon Film 50%
• Film Substrate 50%
• Reduced Load 50%
• Tribological Behavior 50%
• Vacuum-arc Method 50%
• Stress Load 50%
• Substrate Hardness 50%
• Film Removal 50%
• Load-carrying Ability 50%

Material Science

• Tetrahedral Amorphous Carbon 100%
• Carbon Films 100%
• Film 100%
• Silicon 100%
• Thin Films 40%
• Indentation 20%
• Film Thickness 20%
• Nanoindentation 20%
• Composite Films 20%
• Delamination 20%
• Thick Films 20%