Nanofabrication for multi states of Ge2Sb2Te5 by femto-seond laser induced forward transfer

Ming Lun Tseng, Bo Han Chen, Cheng Hung Chu, Chia Min Chang, Hai Pang Chiang, Din Ping Tsai

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

The nano patterns of phase-change material Ge2Sb2Te5 are fabricated by the femto-second laser-induced forward transfer method. The size and the phase state of the Ge2Sb2Te5 patterns can be effectively controlled by varying the applied laser fluence and film thickness. Also, the multilevel electronic states of fabricated patterns are observed through the conductive-atomic force microscopy. This research has great potential in the area of the optical and the electrical data storage.

Original languageEnglish
Title of host publicationJoint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011
PublisherOptical Society of American (OSA)
ISBN (Print)9781557529152
Publication statusPublished - Jul 2011
Externally publishedYes
EventJoint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011 - Kauai, HI, United States
Duration: 17 Jul 201120 Jul 2011

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceJoint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011
Country/TerritoryUnited States
CityKauai, HI
Period17/07/1120/07/11

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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