Nano-scale displacement measurement of MEMS devices using fiber optic interferometry

C. W. Lee, Xuming Zhang, S. C. Tjin, A. Q. Liu

Research output: Journal article publicationConference articleAcademic researchpeer-review

4 Citations (Scopus)

Abstract

In this paper, the application of fiber interferometry in the nano-scale displacement measurement of microelectromechanical system (MEMS) device is being presented. Fiber optic interferometry combines the benefits of the optical fiber such as lightweight, small size and wide bandwidth with the high resolution, high sensitivity capability of the interferometry. It also provides easier setup and offers lower energy loss than the conventional free-spaced interferometry. The fiber optic interferometric system comprises a laser source and a 2 × 2 fiber coupler. The reference arm and the sensing arm of the interferometer are formed within a single output of the coupler. The resultant interference intensity is measured at one of the fiber coupler input. The fiber optic interferometry could be used for the MEMS with moving structure. A case study is being carried out to investigate the displacement of the micromirror in the MEMS Fabry-Perot Filter. The mirror is being driven by the comb drive actuator under the effect of applied voltage. It selectively reflects certain wavelengths while allows others to pass through determined by the air cavity length. The displacement under different applied voltages will be measured using the fiber optic interferometry. The experiment and the result will be demonstrated.
Original languageEnglish
Pages (from-to)196-201
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5145
Publication statusPublished - 1 Dec 2003
Externally publishedYes
EventMicrosystems Engineering: Metrology and Inspection III - Munich, Germany
Duration: 23 Jun 200325 Jun 2003

Keywords

  • MEMS
  • MEMS measurement
  • Optic interferometry

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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