@inproceedings{bc5dc6b4c8cf48f1bfc3cae7f01bcc38,
title = "Nano-opto-mechanical (NOM) acoustic wavefront sensor via ring resonators",
abstract = "Nano-opto-mechanical systems (NOMS) based sensor is attracting widely attention due to its low cost, small footprint and good capability. Optical enabled NOMS acoustic wavefront sensor offers superior resolution and resilience to electromagnetic interference. In this paper, a novel NOMS acoustic wavefront sensor based on ring resonator array is proposed. The resonance wavelength of the ring resonator is modified by the membrane which is beneath the ring resonator can be deformed by the acoustic pressure. It has merits including high sensitivity, good linearity, CMOS compatibility and ease in integration.",
keywords = "Acoustic wavefront sensor, NOMS, ring resonator array",
author = "B. Dong and H. Cai and Tsai, {J. M.} and P. Kropelnicki and Randles, {A. B.} and M. Tang and Kwong, {D. L.} and Liu, {A. Q.}",
year = "2013",
month = jun,
doi = "10.1109/Transducers.2013.6627273",
language = "English",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "2333--2336",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}