Nano-opto-mechanical memory based on optical gradient force induced bistability

B. Dong; J. G. Huang; H. Cai; P. Kropelnicki; A. B. Randles; Y. D. Gu; A. Q. Liu

doi:10.1109/MEMSYS.2014.6765835

Nano-opto-mechanical memory based on optical gradient force induced bistability

B. Dong, J. G. Huang, H. Cai, P. Kropelnicki, A. B. Randles, Y. D. Gu, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

A bistable nano-opto-mechanical memory is designed, fabricated and experimentally demonstrated. A doubly-clamped silicon beam is deformed by optical gradient force generated from the ring resonator. The doubly-clamped silicon beam can be bended due to attractive optical gradient force generated by ring resonator. Due to the non-linear behavior of optical gradient force, the silicon beam has two stable positions which can be switched by controlling the light power transmitted inside the ring resonator. The nano-size of the memory enable for large scale integration, high speed operation and low power consumption. It has other potential applications such as optical switch, logic gate and actuator.

Original language	English
Title of host publication	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1091-1094
Number of pages	4
ISBN (Print)	9781479935086
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765835
Publication status	Published - Jan 2014
Externally published	Yes
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States Duration: 26 Jan 2014 → 30 Jan 2014

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country/Territory	United States
City	San Francisco, CA
Period	26/01/14 → 30/01/14

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

More information

10.1109/MEMSYS.2014.6765835

Cite this

Dong, B., Huang, J. G., Cai, H., Kropelnicki, P., Randles, A. B., Gu, Y. D., & Liu, A. Q. (2014). Nano-opto-mechanical memory based on optical gradient force induced bistability. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 1091-1094). Article 6765835 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765835

Dong, B. ; Huang, J. G. ; Cai, H. et al. / Nano-opto-mechanical memory based on optical gradient force induced bistability. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 1091-1094 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Nano-opto-mechanical memory based on optical gradient force induced bistability",

abstract = "A bistable nano-opto-mechanical memory is designed, fabricated and experimentally demonstrated. A doubly-clamped silicon beam is deformed by optical gradient force generated from the ring resonator. The doubly-clamped silicon beam can be bended due to attractive optical gradient force generated by ring resonator. Due to the non-linear behavior of optical gradient force, the silicon beam has two stable positions which can be switched by controlling the light power transmitted inside the ring resonator. The nano-size of the memory enable for large scale integration, high speed operation and low power consumption. It has other potential applications such as optical switch, logic gate and actuator.",

author = "B. Dong and Huang, {J. G.} and H. Cai and P. Kropelnicki and Randles, {A. B.} and Gu, {Y. D.} and Liu, {A. Q.}",

year = "2014",

month = jan,

doi = "10.1109/MEMSYS.2014.6765835",

language = "English",

isbn = "9781479935086",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1091--1094",

booktitle = "MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems",

note = "27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 ; Conference date: 26-01-2014 Through 30-01-2014",

}

Dong, B, Huang, JG, Cai, H, Kropelnicki, P, Randles, AB, Gu, YD & Liu, AQ 2014, Nano-opto-mechanical memory based on optical gradient force induced bistability. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765835, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 1091-1094, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 26/01/14. https://doi.org/10.1109/MEMSYS.2014.6765835

Nano-opto-mechanical memory based on optical gradient force induced bistability. / Dong, B.; Huang, J. G.; Cai, H. et al.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 1091-1094 6765835 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AB - A bistable nano-opto-mechanical memory is designed, fabricated and experimentally demonstrated. A doubly-clamped silicon beam is deformed by optical gradient force generated from the ring resonator. The doubly-clamped silicon beam can be bended due to attractive optical gradient force generated by ring resonator. Due to the non-linear behavior of optical gradient force, the silicon beam has two stable positions which can be switched by controlling the light power transmitted inside the ring resonator. The nano-size of the memory enable for large scale integration, high speed operation and low power consumption. It has other potential applications such as optical switch, logic gate and actuator.

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Dong B, Huang JG, Cai H, Kropelnicki P, Randles AB, Gu YD et al. Nano-opto-mechanical memory based on optical gradient force induced bistability. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 1091-1094. 6765835. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765835

Nano-opto-mechanical memory based on optical gradient force induced bistability

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