Nano-opto-mechanical linear actuator utilizing gradient optical force

H. Cai; K. J. Xu; J. M. Tsai; G. Q. Lo; D. L. Kwong; A. Q. Liu

doi:10.1109/TRANSDUCERS.2011.5969615

Nano-opto-mechanical linear actuator utilizing gradient optical force

H. Cai, K. J. Xu, J. M. Tsai, G. Q. Lo, D. L. Kwong, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

7 Citations (Scopus)

Abstract

This work presents an opto-mechanical linear actuator utilizing the gradient optical force between two identical parallel waveguides. The actuator size shrinks to nanoscale dimensions. Theoretical study shows that the actuator deflection is controlled over optical signals and linearly proportional to the applied optical power. Such optical actuator takes full advantages of the nanotechnology, and has many advantages over their electrostatic comb-drive counterparts, most importantly immunity to electromagnetic interference and mechanical shock, and avoiding the problem of side instability.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	1709-1712
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969615
Publication status	Published - Jun 2011
Externally published	Yes
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11

Keywords

actuator
nanophotonics
NEMS/MEMS
Optomechanics

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

More information

10.1109/TRANSDUCERS.2011.5969615

Cite this

Cai, H., Xu, K. J., Tsai, J. M., Lo, G. Q., Kwong, D. L., & Liu, A. Q. (2011). Nano-opto-mechanical linear actuator utilizing gradient optical force. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1709-1712). Article 5969615 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969615

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abstract = "This work presents an opto-mechanical linear actuator utilizing the gradient optical force between two identical parallel waveguides. The actuator size shrinks to nanoscale dimensions. Theoretical study shows that the actuator deflection is controlled over optical signals and linearly proportional to the applied optical power. Such optical actuator takes full advantages of the nanotechnology, and has many advantages over their electrostatic comb-drive counterparts, most importantly immunity to electromagnetic interference and mechanical shock, and avoiding the problem of side instability.",

keywords = "actuator, nanophotonics, NEMS/MEMS, Optomechanics",

author = "H. Cai and Xu, {K. J.} and Tsai, {J. M.} and Lo, {G. Q.} and Kwong, {D. L.} and Liu, {A. Q.}",

year = "2011",

month = jun,

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booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

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Cai, H, Xu, KJ, Tsai, JM, Lo, GQ, Kwong, DL & Liu, AQ 2011, Nano-opto-mechanical linear actuator utilizing gradient optical force. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969615, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 1709-1712, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969615

Nano-opto-mechanical linear actuator utilizing gradient optical force. / Cai, H.; Xu, K. J.; Tsai, J. M. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1709-1712 5969615 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AB - This work presents an opto-mechanical linear actuator utilizing the gradient optical force between two identical parallel waveguides. The actuator size shrinks to nanoscale dimensions. Theoretical study shows that the actuator deflection is controlled over optical signals and linearly proportional to the applied optical power. Such optical actuator takes full advantages of the nanotechnology, and has many advantages over their electrostatic comb-drive counterparts, most importantly immunity to electromagnetic interference and mechanical shock, and avoiding the problem of side instability.

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Cai H, Xu KJ, Tsai JM, Lo GQ, Kwong DL, Liu AQ. Nano-opto-mechanical linear actuator utilizing gradient optical force. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1709-1712. 5969615. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969615

Nano-opto-mechanical linear actuator utilizing gradient optical force

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Keywords

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