Nano-opto-mechanical actuator driven by optical radiation force

X. Zhao; J. M. Tsai; H. Cai; X. M. Ji; J. Zhou; M. H. Bao; Y. P. Huang; D. L. Kwang; A. Q. Liu

doi:10.1109/TRANSDUCERS.2011.5969628

Nano-opto-mechanical actuator driven by optical radiation force

X. Zhao, J. M. Tsai, H. Cai, X. M. Ji, J. Zhou, M. H. Bao, Y. P. Huang, D. L. Kwang, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

1 Citation (Scopus)

Abstract

This paper presents a Nano-opto-mechanical actuator, which is driven by optical radiation force. The actuator consists of two waveguides, two identical ring resonators, and an actuator with Bragg reflector. Light is injected into the waveguides and coupled to the Bragg reflector via the ring resonator. The actuator is displaced by the optical force. The achieved maximum displacement of the actuator is 500.2 nm with the optical power up to 200 mW. The optical actuator has merits of high resolution (2.501 nm/mW), approximately perfect linear displacement and contact-free optical drive, which results in potential applications such as precise distance control, tunable laser, and weak force detection.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	1468-1471
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969628
Publication status	Published - Jun 2011
Externally published	Yes
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11

Keywords

actuators
Nano-opto-mechanical Systems (NOMS)
optical force

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

More information

10.1109/TRANSDUCERS.2011.5969628

Cite this

Zhao, X., Tsai, J. M., Cai, H., Ji, X. M., Zhou, J., Bao, M. H., Huang, Y. P., Kwang, D. L., & Liu, A. Q. (2011). Nano-opto-mechanical actuator driven by optical radiation force. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1468-1471). Article 5969628 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969628

@inproceedings{734883a365d34b108ff67a324ad199b9,

title = "Nano-opto-mechanical actuator driven by optical radiation force",

abstract = "This paper presents a Nano-opto-mechanical actuator, which is driven by optical radiation force. The actuator consists of two waveguides, two identical ring resonators, and an actuator with Bragg reflector. Light is injected into the waveguides and coupled to the Bragg reflector via the ring resonator. The actuator is displaced by the optical force. The achieved maximum displacement of the actuator is 500.2 nm with the optical power up to 200 mW. The optical actuator has merits of high resolution (2.501 nm/mW), approximately perfect linear displacement and contact-free optical drive, which results in potential applications such as precise distance control, tunable laser, and weak force detection.",

keywords = "actuators, Nano-opto-mechanical Systems (NOMS), optical force",

author = "X. Zhao and Tsai, {J. M.} and H. Cai and Ji, {X. M.} and J. Zhou and Bao, {M. H.} and Huang, {Y. P.} and Kwang, {D. L.} and Liu, {A. Q.}",

year = "2011",

month = jun,

doi = "10.1109/TRANSDUCERS.2011.5969628",

language = "English",

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series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

pages = "1468--1471",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

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Zhao, X, Tsai, JM, Cai, H, Ji, XM, Zhou, J, Bao, MH, Huang, YP, Kwang, DL & Liu, AQ 2011, Nano-opto-mechanical actuator driven by optical radiation force. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969628, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 1468-1471, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969628

Nano-opto-mechanical actuator driven by optical radiation force. / Zhao, X.; Tsai, J. M.; Cai, H. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1468-1471 5969628 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AU - Zhao, X.

AU - Tsai, J. M.

AU - Cai, H.

AU - Ji, X. M.

AU - Zhou, J.

AU - Bao, M. H.

AU - Huang, Y. P.

AU - Kwang, D. L.

AU - Liu, A. Q.

PY - 2011/6

Y1 - 2011/6

N2 - This paper presents a Nano-opto-mechanical actuator, which is driven by optical radiation force. The actuator consists of two waveguides, two identical ring resonators, and an actuator with Bragg reflector. Light is injected into the waveguides and coupled to the Bragg reflector via the ring resonator. The actuator is displaced by the optical force. The achieved maximum displacement of the actuator is 500.2 nm with the optical power up to 200 mW. The optical actuator has merits of high resolution (2.501 nm/mW), approximately perfect linear displacement and contact-free optical drive, which results in potential applications such as precise distance control, tunable laser, and weak force detection.

AB - This paper presents a Nano-opto-mechanical actuator, which is driven by optical radiation force. The actuator consists of two waveguides, two identical ring resonators, and an actuator with Bragg reflector. Light is injected into the waveguides and coupled to the Bragg reflector via the ring resonator. The actuator is displaced by the optical force. The achieved maximum displacement of the actuator is 500.2 nm with the optical power up to 200 mW. The optical actuator has merits of high resolution (2.501 nm/mW), approximately perfect linear displacement and contact-free optical drive, which results in potential applications such as precise distance control, tunable laser, and weak force detection.

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KW - optical force

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ER -

Zhao X, Tsai JM, Cai H, Ji XM, Zhou J, Bao MH et al. Nano-opto-mechanical actuator driven by optical radiation force. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1468-1471. 5969628. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969628

Nano-opto-mechanical actuator driven by optical radiation force

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