Nano-opto-electro-mechanical (NOEM) oscillator with controllable non-linear dynamics

B. Dong, J. G. Huang, H. Cai, P. Kropelnicki, A. B. Randles, Y. D. Gu, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

In this paper, a nano-opto-electro-mechanical (NOEM) oscillator with controllable non-linear dynamics is demonstrated. An optical gradient force driven cantilever shows high non-linearity due to non-linear behavior of the optical force. The non-linear dynamics of the oscillator which utilizes opto-mechanical interaction is well studied and controlled by varying the optical signal, including the power and wavelength. The resonance frequency of the oscillator can be tuned by up to 50 KHz by changing the detuning condition of the opto-mechanical system. It has potential applications such as optical navigation sensors, actuators and optical switches.

Original languageEnglish
Title of host publicationMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1261-1264
Number of pages4
ISBN (Print)9781479935086
DOIs
Publication statusPublished - Jan 2014
Externally publishedYes
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
Duration: 26 Jan 201430 Jan 2014

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country/TerritoryUnited States
CitySan Francisco, CA
Period26/01/1430/01/14

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Nano-opto-electro-mechanical (NOEM) oscillator with controllable non-linear dynamics'. Together they form a unique fingerprint.

Cite this