Nano actuator and "pull-back" nonlinearity

M. Ren, H. Lai, L. M.J. Isai, D. L. Kwong, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

This paper presents an optical force driven nano-machined actuator and the "pull-back" effect of a free-standing arc in an opto-mechanical ring resonator system. This nano-actuator obtains a maximal central displacement of 43.1 nm, with an actuation resolution of 0.28 nm, via tuning the wavelength of the control light at a fixed optical power of 2.8 mW. The 'pull-back' effect occurs at the maximal displacement position, which is studied by the combination of experiments and simulation. Potential applications include bio-nano-motor, all-optical switches and opto-mechanical memories.

Original languageEnglish
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages717-720
Number of pages4
DOIs
Publication statusPublished - Jan 2013
Externally publishedYes
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan
Duration: 20 Jan 201324 Jan 2013

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

ConferenceIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Country/TerritoryTaiwan
CityTaipei
Period20/01/1324/01/13

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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