TY - GEN
T1 - Nano actuator and "pull-back" nonlinearity
AU - Ren, M.
AU - Lai, H.
AU - Isai, L. M.J.
AU - Kwong, D. L.
AU - Liu, A. Q.
PY - 2013/1
Y1 - 2013/1
N2 - This paper presents an optical force driven nano-machined actuator and the "pull-back" effect of a free-standing arc in an opto-mechanical ring resonator system. This nano-actuator obtains a maximal central displacement of 43.1 nm, with an actuation resolution of 0.28 nm, via tuning the wavelength of the control light at a fixed optical power of 2.8 mW. The 'pull-back' effect occurs at the maximal displacement position, which is studied by the combination of experiments and simulation. Potential applications include bio-nano-motor, all-optical switches and opto-mechanical memories.
AB - This paper presents an optical force driven nano-machined actuator and the "pull-back" effect of a free-standing arc in an opto-mechanical ring resonator system. This nano-actuator obtains a maximal central displacement of 43.1 nm, with an actuation resolution of 0.28 nm, via tuning the wavelength of the control light at a fixed optical power of 2.8 mW. The 'pull-back' effect occurs at the maximal displacement position, which is studied by the combination of experiments and simulation. Potential applications include bio-nano-motor, all-optical switches and opto-mechanical memories.
UR - http://www.scopus.com/inward/record.url?scp=84875475214&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2013.6474343
DO - 10.1109/MEMSYS.2013.6474343
M3 - Conference article published in proceeding or book
AN - SCOPUS:84875475214
SN - 9781467356558
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 717
EP - 720
BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Y2 - 20 January 2013 through 24 January 2013
ER -