Abstract
This paper reports a multifunctional optical sensor platform based on the microelectromechanical systems (MEMS) technology with the aim to miniaturize conventional bulky optical measurement systems for space-constrained applications and harsh environment. Small discrete optical components are integrated onto a printed circuit board by using optical fibers as the waveguide. Low-coherence interferometry is used for modulation and retrieval of the sensing signal. The whole optical system including the related circuit takes up a footprint of 2.2″ × 1.5″. To test the functionality, a fiber-tip pressure sensor is interrogated using this platform. The successful demonstration suggests that this platform can be used for optical measurement in the sensor node of Wireless Sensor Networks (WSNs).
| Original language | English |
|---|---|
| Title of host publication | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 |
| Pages | 1566-1569 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 1 Sept 2011 |
| Event | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011 |
Conference
| Conference | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 |
|---|---|
| Country/Territory | China |
| City | Beijing |
| Period | 5/06/11 → 9/06/11 |
Keywords
- low coherence interferometry
- Optical integration
- optical sensors
- wireless sensor network
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
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