Abstract
This paper reports a multifunctional optical sensor platform based on the microelectromechanical systems (MEMS) technology with the aim to miniaturize conventional bulky optical measurement systems for space-constrained applications and harsh environment. Small discrete optical components are integrated onto a printed circuit board by using optical fibers as the waveguide. Low-coherence interferometry is used for modulation and retrieval of the sensing signal. The whole optical system including the related circuit takes up a footprint of 2.2″ × 1.5″. To test the functionality, a fiber-tip pressure sensor is interrogated using this platform. The successful demonstration suggests that this platform can be used for optical measurement in the sensor node of Wireless Sensor Networks (WSNs).
Original language | English |
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Title of host publication | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 |
Pages | 1566-1569 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 1 Sept 2011 |
Event | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011 |
Conference
Conference | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 |
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Country/Territory | China |
City | Beijing |
Period | 5/06/11 → 9/06/11 |
Keywords
- low coherence interferometry
- Optical integration
- optical sensors
- wireless sensor network
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering