Multifunctional optical MEMS sensor platform for wireless optical sensor networks

C. Pang, M. Yu, Xuming Zhang, A. K. Gupta, K. M. Bryden

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

4 Citations (Scopus)

Abstract

This paper reports a multifunctional optical sensor platform based on the microelectromechanical systems (MEMS) technology with the aim to miniaturize conventional bulky optical measurement systems for space-constrained applications and harsh environment. Small discrete optical components are integrated onto a printed circuit board by using optical fibers as the waveguide. Low-coherence interferometry is used for modulation and retrieval of the sensing signal. The whole optical system including the related circuit takes up a footprint of 2.2″ × 1.5″. To test the functionality, a fiber-tip pressure sensor is interrogated using this platform. The successful demonstration suggests that this platform can be used for optical measurement in the sensor node of Wireless Sensor Networks (WSNs).
Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1566-1569
Number of pages4
DOIs
Publication statusPublished - 1 Sep 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 5 Jun 20119 Jun 2011

Conference

Conference2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/TerritoryChina
CityBeijing
Period5/06/119/06/11

Keywords

  • low coherence interferometry
  • Optical integration
  • optical sensors
  • wireless sensor network

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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