Monte Carlo simulation of nanocrystalline TiN/amorphous SiNx composite films

Z. J. Liu; C. H. Zhang; Y. G. Shen; Y. W. Mai

doi:10.1063/1.1633650

Monte Carlo simulation of nanocrystalline TiN/amorphous SiN_x composite films

Z. J. Liu, C. H. Zhang, Y. G. Shen, Y. W. Mai

Research output: Journal article publication › Journal article › Academic research › peer-review

28 Citations (Scopus)

Abstract

A theoretical approach to model the microstructures of TiN/SiN_x films by Monte Carlo methods was discussed. The nanocomposite films with microstructures comprising nanocrystalline TiN grains in an amorphous SiN _x matrix were driven by the energy difference between the TiN grain-boundary energy and TiN/SiN_x interfacial energy. The SiN _x matrix caused a remarkable reduction in TiN grain size. The results show that the average size of TiN grains decreases with volume fraction of SiN_x according to a power law with a time-dependent exponent decreasing with growth time.

Original language	English
Pages (from-to)	758-760
Number of pages	3
Journal	Journal of Applied Physics
Volume	95
Issue number	2
DOIs	https://doi.org/10.1063/1.1633650
Publication status	Published - 15 Jan 2004
Externally published	Yes

ASJC Scopus subject areas

General Physics and Astronomy

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10.1063/1.1633650

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abstract = "A theoretical approach to model the microstructures of TiN/SiNx films by Monte Carlo methods was discussed. The nanocomposite films with microstructures comprising nanocrystalline TiN grains in an amorphous SiN x matrix were driven by the energy difference between the TiN grain-boundary energy and TiN/SiNx interfacial energy. The SiN x matrix caused a remarkable reduction in TiN grain size. The results show that the average size of TiN grains decreases with volume fraction of SiNx according to a power law with a time-dependent exponent decreasing with growth time.",

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AB - A theoretical approach to model the microstructures of TiN/SiNx films by Monte Carlo methods was discussed. The nanocomposite films with microstructures comprising nanocrystalline TiN grains in an amorphous SiN x matrix were driven by the energy difference between the TiN grain-boundary energy and TiN/SiNx interfacial energy. The SiN x matrix caused a remarkable reduction in TiN grain size. The results show that the average size of TiN grains decreases with volume fraction of SiNx according to a power law with a time-dependent exponent decreasing with growth time.

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Monte Carlo simulation of nanocrystalline TiN/amorphous SiN_x composite films

Abstract

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