Modulated-ellipse servo cutting of micro-structured surfaces with high-steep slopes

This study introduces modulated-ellipse servo cutting technology for machining of micro-structured surfaces with high-steep slopes and hybrid micro-structures. MESC is able to jointly control tool orientation and cutting trajectory by integrating multi-axis fast and slow servo motions to create a primary elliptical cutting trajectory with a fixed rake angle. Simultaneously, the elliptical cutting trajectory is modulated by a dual-axial fast servo motion platform to produce desired hybrid micro-structures with information storage. Micro-structural arrays with steep slopes of up to 70° and micro-pits with hybrid micro-structures encoding Morse code information are machined with ultra-fine form accuracy of 30 nm.