Modelling and analysis of a type of capacitance based accelerometer

Dan Zhang; Bin Wei

doi:10.18178/ijmerr.6.6.434-439

Modelling and analysis of a type of capacitance based accelerometer

Dan Zhang, Bin Wei

Research output: Journal article publication › Journal article › Academic research › peer-review

1 Citation (Scopus)

Abstract

In this paper, a capacitance based accelerometer is studied. The sensitivity, frequency response, mask layout and finally fabrication process are presented. For the sensitivity of the selected accelerometer, the relative change of capacitance of the selected accelerometer with respect to acceleration a is derived, the frequency response of the accelerometer is investigated, and the value of which is estimated under the specified parameters provided; finally the accelerometer is displayed and it is fabricated by using several steps of deposition, patterning and etching.

Original language	English
Pages (from-to)	434-439
Number of pages	6
Journal	International Journal of Mechanical Engineering and Robotics Research
Volume	6
Issue number	6
DOIs	https://doi.org/10.18178/ijmerr.6.6.434-439
Publication status	Published - 1 Nov 2017
Externally published	Yes

Keywords

Accelerometer
Capacitance
Frequency response
Modelling
Sensitivity

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Artificial Intelligence

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10.18178/ijmerr.6.6.434-439

Cite this

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keywords = "Accelerometer, Capacitance, Frequency response, Modelling, Sensitivity",

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AB - In this paper, a capacitance based accelerometer is studied. The sensitivity, frequency response, mask layout and finally fabrication process are presented. For the sensitivity of the selected accelerometer, the relative change of capacitance of the selected accelerometer with respect to acceleration a is derived, the frequency response of the accelerometer is investigated, and the value of which is estimated under the specified parameters provided; finally the accelerometer is displayed and it is fabricated by using several steps of deposition, patterning and etching.

KW - Accelerometer

KW - Capacitance

KW - Frequency response

KW - Modelling

KW - Sensitivity

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Modelling and analysis of a type of capacitance based accelerometer

Abstract

Keywords

ASJC Scopus subject areas

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