Modeling of tool influence function for high-efficiency polishing

The M-shaped tool influence function (TIF) usually comes out when adopting a large tool offset at the high-efficiency polishing stage in bonnet polishing. Its modeling is as important as the Gaussian-like TIF for the polishing process. However, the existing reports on the TIF of bonnet polishing are mostly about the Gaussian-like TIF model, or the model which cannot accurately simulate the M-shaped TIF. Viewing this, an optimized TIF model about the semirigid (SR) bonnet tool is presented based on the finite element analysis method which can be used to model both M-shaped and Gaussian-like TIFs. The verification experiments show that the simulated TIFs based on this model are in good agreement with the actual measured TIF. The relative deviation between them is about only 5 % in terms of root mean square value of the residual error.