Modeling of the optical torsion micromirror

X. M. Zhang; F. S. Chau; C. Quan; A. Q. Liu

doi:10.1117/12.369382

Modeling of the optical torsion micromirror

X. M. Zhang, F. S. Chau, C. Quan, A. Q. Liu

Research output: Journal article publication › Conference article › Academic research › peer-review

21 Citations (Scopus)

Abstract

Torsion micromirror devices have been widely used in many applications. This paper describes the modeling of a torsion beam micromirror based on the parallel plate capacitor model. First, a generalized and normalized equation that governs the static characteristics of the torsion micromirror device is derived. Henceforth the influence of the structural parameters of micromirror is discussed, and the snap-down effect and the capacitance variation of the micromirror are studied. Finally, a micromirror is designed and fabricated. However, the model has not yet been verified by experiment data as testing is in progress.

Original language	English
Pages (from-to)	109-116
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3899
DOIs	https://doi.org/10.1117/12.369382
Publication status	Published - Nov 1999
Externally published	Yes
Event	Proceedings of the 1999 Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures - Singapore, Singapore Duration: 1 Dec 1999 → 3 Dec 1999

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

More information

10.1117/12.369382

Cite this

@article{a1d7afc743ef46ffb4e9c1c19c266fb0,

title = "Modeling of the optical torsion micromirror",

abstract = "Torsion micromirror devices have been widely used in many applications. This paper describes the modeling of a torsion beam micromirror based on the parallel plate capacitor model. First, a generalized and normalized equation that governs the static characteristics of the torsion micromirror device is derived. Henceforth the influence of the structural parameters of micromirror is discussed, and the snap-down effect and the capacitance variation of the micromirror are studied. Finally, a micromirror is designed and fabricated. However, the model has not yet been verified by experiment data as testing is in progress.",

author = "Zhang, {X. M.} and Chau, {F. S.} and C. Quan and Liu, {A. Q.}",

year = "1999",

month = nov,

doi = "10.1117/12.369382",

language = "English",

volume = "3899",

pages = "109--116",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Proceedings of the 1999 Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures ; Conference date: 01-12-1999 Through 03-12-1999",

}

TY - JOUR

T1 - Modeling of the optical torsion micromirror

AU - Zhang, X. M.

AU - Chau, F. S.

AU - Quan, C.

AU - Liu, A. Q.

PY - 1999/11

Y1 - 1999/11

N2 - Torsion micromirror devices have been widely used in many applications. This paper describes the modeling of a torsion beam micromirror based on the parallel plate capacitor model. First, a generalized and normalized equation that governs the static characteristics of the torsion micromirror device is derived. Henceforth the influence of the structural parameters of micromirror is discussed, and the snap-down effect and the capacitance variation of the micromirror are studied. Finally, a micromirror is designed and fabricated. However, the model has not yet been verified by experiment data as testing is in progress.

AB - Torsion micromirror devices have been widely used in many applications. This paper describes the modeling of a torsion beam micromirror based on the parallel plate capacitor model. First, a generalized and normalized equation that governs the static characteristics of the torsion micromirror device is derived. Henceforth the influence of the structural parameters of micromirror is discussed, and the snap-down effect and the capacitance variation of the micromirror are studied. Finally, a micromirror is designed and fabricated. However, the model has not yet been verified by experiment data as testing is in progress.

UR - http://www.scopus.com/inward/record.url?scp=0033309290&partnerID=8YFLogxK

U2 - 10.1117/12.369382

DO - 10.1117/12.369382

M3 - Conference article

AN - SCOPUS:0033309290

SN - 0277-786X

VL - 3899

SP - 109

EP - 116

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Proceedings of the 1999 Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures

Y2 - 1 December 1999 through 3 December 1999

ER -

Modeling of the optical torsion micromirror

Abstract

ASJC Scopus subject areas

More information

Other files and links

Fingerprint

Cite this