Modeling and optimal design of high sensitivity piezoresistive microcantilevers for biosensing applications

Mo Yang, Xuan Zhang, Cengiz S. Ozkan

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

6 Citations (Scopus)


The mechanical design and optimization of piezoresistive cantilevers for biosensing applications is studied via finite element analysis. Models are described for predicting the static behavior of cantilevers with elastic and piezoresistive layers. The silicon based cantilevers have thicknesses typically on the order of a few microns and are doped to introduce their piezoresistive characteristics. Parametric modeling based on the finite element method is used to help determine the optimum parameters of cantilever design. Chemo-mechanical binding forces have been analyzed to understand issues of saturation over the cantilever surface. Furthermore, the introduction of stress concentration regions during cantilever fabrication has been discussed which greatly enhances the detection sensitivity through increased surface stress. Finally, novel microcantilever assemblies are presented for the first time that can increase the deflection due to chemical reaction.
Original languageEnglish
Title of host publication2003 Nanotechnology Conference and Trade Show - Nanotech 2003
Number of pages4
Publication statusPublished - 1 Dec 2003
Externally publishedYes
Event2003 Nanotechnology Conference and Trade Show - Nanotech 2003 - San Francisco, CA, United States
Duration: 23 Feb 200327 Feb 2003


Conference2003 Nanotechnology Conference and Trade Show - Nanotech 2003
Country/TerritoryUnited States
CitySan Francisco, CA


  • Chemo-mechanical stress
  • Finite element modeling
  • Piezoresistive cantilevers

ASJC Scopus subject areas

  • Engineering(all)

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