Abstract
The mechanical design and optimization of piezoresistive cantilevers for biosensing applications is studied via finite element analysis. Models are described for predicting the static behavior of cantilevers with elastic and piezoresistive layers. The silicon based cantilevers have thicknesses typically on the order of a few microns and are doped to introduce their piezoresistive characteristics. Parametric modeling based on the finite element method is used to help determine the optimum parameters of cantilever design. Chemo-mechanical binding forces have been analyzed to understand issues of saturation over the cantilever surface. Furthermore, the introduction of stress concentration regions during cantilever fabrication has been discussed which greatly enhances the detection sensitivity through increased surface stress. Finally, novel microcantilever assemblies are presented for the first time that can increase the deflection due to chemical reaction.
| Original language | English |
|---|---|
| Title of host publication | 2003 Nanotechnology Conference and Trade Show - Nanotech 2003 |
| Pages | 360-363 |
| Number of pages | 4 |
| Volume | 1 |
| Publication status | Published - 1 Dec 2003 |
| Externally published | Yes |
| Event | 2003 Nanotechnology Conference and Trade Show - Nanotech 2003 - San Francisco, CA, United States Duration: 23 Feb 2003 → 27 Feb 2003 |
Conference
| Conference | 2003 Nanotechnology Conference and Trade Show - Nanotech 2003 |
|---|---|
| Country | United States |
| City | San Francisco, CA |
| Period | 23/02/03 → 27/02/03 |
Keywords
- Chemo-mechanical stress
- Finite element modeling
- Piezoresistive cantilevers
ASJC Scopus subject areas
- Engineering(all)