Modeling and control of rate-dependent hysteresis for a piezo-driven micropositioning stage

Qingsong Xu, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

10 Citations (Scopus)


Piezoelectric hysteresis usually relies on the frequency of the input signal. Most of the existing rate-dependent models use a lot of parameters to capture the rate-dependent hysteresis. In this paper, a simple rate-dependent hysteresis model is proposed to describe the frequency dependency effect of a micropositioning stage driven by piezoelectric actuators. This model is extended from an enhanced Coleman-Hodgdon (C-H) model. It has only 9 parameters and exhibits an accuracy better than 97%. The dependencies of the model parameters on the input rate are derived based on open-loop experimental tests. As inverse rate-dependent C-H model is established to construct a feedforward compensation. Experimental results demonstrate the effectiveness of the rate-dependent model over the traditional rate-independent one. The feedforward in conjunction with a PID feedback control is constructed to further attenuate the modeling errors and creep effects. Results show that the combined control scheme suppresses the tracking error by more than 8 times compared to the stand-alone PID control. It provides a sound base of practical control of the micropositioning system for micro/nano scale manipulation.
Original languageEnglish
Title of host publication2011 IEEE International Conference on Robotics and Automation, ICRA 2011
Number of pages6
Publication statusPublished - 1 Dec 2011
Externally publishedYes
Event2011 IEEE International Conference on Robotics and Automation, ICRA 2011 - Shanghai, China
Duration: 9 May 201113 May 2011


Conference2011 IEEE International Conference on Robotics and Automation, ICRA 2011

ASJC Scopus subject areas

  • Software
  • Control and Systems Engineering
  • Artificial Intelligence
  • Electrical and Electronic Engineering

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